超声振动辅助激光烧蚀铝表面形貌仿真分析  

Simulation of ultrasonic vibration-assisted laser ablation of aluminum surface morphology

作　　者：张明月 王岩[1,2] 殷杰 董颖怀 李跃华[3] 赵静楠 ZHANG Mingyue;WANG Yan;YIN Jie;DONG Yinghuai;LI Yuehua;ZHAO Jingnan(College of Mechanical Engineering,Tianjin University of Science and Technology,Tianjin 300222,China;Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry&Food Machinery and Equipment,Tianjin 300222,China;Tianjin Institute of Aerospace Mechanical and Electrical Equipment,Tianjin 300301,China)

机构地区：[1]天津科技大学机械工程学院,天津300222 [2]天津市轻工与食品工程机械装备集成设计与在线监控重点实验室,天津300222 [3]天津航天机电设备研究所,天津300301

出　　处：《光电子．激光》2023年第3期321-327,共7页Journal of Optoelectronics·Laser

基　　金：天津市自然科学基金项目(19JCZDJC33200,18JCQNJC05200,18JCYBJC88900);天津市教委科研计划项目(2018KJ116);2021年天津市研究生科研创新项目(2021YJSS043)资助项目。

摘　　要：为研究超声复合激光蚀除机理,本文使用COMSOL软件对超声振动辅助激光烧蚀金属铝表面烧蚀过程进行仿真,对比研究了超声振动对激光蚀除机理和过程的影响。研究发现,激光烧蚀的开始阶段主要以高温汽化来去除材料。随着烧蚀时间的增加,蚀除方式主要转变为熔融物飞溅蚀除,这对烧蚀凹坑的形成起主要作用。并研究了不同频率下激光蚀除材料的速度,研究发现,引入超声振动后,蚀除速度降低了26.2%-39.43%。To investigate the mechanism of ultrasonic compound laser etching,this paper used COMSOL software to simulate ultrasonic vibration-assisted laser ablation of metallic aluminum surfaces.The effect of ultrasonic vibration on the laser alteration mechanism and process was studied in comparison.It was found that the beginning of the laser ablation phase material was removed mainly by high temperature vaporization.As the ablation time increased,the mode of etching changed mainly to melt splash etching,which played a major role in the formation of ablation craters.The speed of laser etching of the material at different frequencies was also investigated.It was found that the introduction of ultrasonic vibration reduced the etching rate by 26.2%-39.43%.

关 键 词：激光烧蚀 COMSOL 超声振动 有限元仿真 表面形貌 

分 类 号：O53[理学—等离子体物理]