高温MEMS薄膜热流传感器研究进展  

Research Progress of MEMS Thin Film Heat Flux Sensors for High-Temperature Environment

作　　者：郭怡雪 张梅菊[2,3] 黄漫国 高向向[1] 郭林琪 张丛春 Guo Yixue;Zhang Meiju;Huang Manguo;Gao Xiangxiang;Guo Linqi;Zhang Congchun(Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200241,China;Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute,Beijing 101111,China;Aviation Key Laboratory of Science and Technology on Spatial Condition Monitoring SensorTechnology,Beijing 101111,China)

机构地区：[1]上海交通大学电子信息与电气工程学院微纳电子学系,上海200241 [2]航空工业北京长城航空测控技术研究所,北京101111 [3]状态监测特种传感技术航空科技重点实验室,北京101111

出　　处：《微纳电子技术》2023年第2期175-183,共9页Micronanoelectronic Technology

基　　金：国家重点研发计划项目(2020YFB2009100)。

摘　　要：对可用于高温环境的MEMS薄膜热流传感器(TFHFS)的测量原理、结构设计、材料成分以及制造技术进行了简单阐述,分别介绍了半无限几何、热阻式、热电堆和横向热电效应型TFHFS的结构特点和应用优势。归纳讨论了国内外科研团队研制的各种TFHFS的量热法、传感方式、结构、材料以及测量模式,按照热敏材料分为金属和合金型、陶瓷和新型聚合物衍生陶瓷型两类,重点关注TFHFS的高温稳定性、响应时间、灵敏度等性能。最后,总结了目前TFHFS面临的技术难题和发展趋势,可为应用于更严酷环境的高温薄膜热流测量技术提供参考。The measuring principle,structural design,material composition and fabricating technology of a MEMS thin film heat flux sensor(TFHFS)for high temperature environment are described.The structure characteristics and application advantages of semi-infinite geometry,thermal resistance,thermopile and transverse thermoelectric effect based TFHFS are introduced respectively.The calorimetric method,sensing mode,structure,material and measurement model of TFHFS made by domestic and foreign research groups are generalized and discussed,which can be divided into metal and alloy,ceramic and polymer derived ceramic types according to the heat sensitive materials.The performances on high temperature stability,response time and sensitivity of TFHFS are focused.Finally,the current technology problems and developing tendency of TFHFS are summarized to provide reference for study on high-temperature thin-film heat flux measurement technology applied in harsher environment.

关 键 词：微电子机械系统(MEMS) 热流 薄膜热流传感器(TFHFS) 高温环境 热敏材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]