金属氧化物pH传感器的研究进展  

Research Progress of Metal Oxide pH Sensors

作　　者：李曼曼 吕旖雯 居家奇 金妍 Li Manman;Lu Yiwen;Ju Jiaqi;Jin Yan(School of Sciences,Shanghai Institute of Technology,Shanghai 201418,China;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]上海应用技术大学理学院,上海201418 [2]中国科学院、上海微系统与信息技术研究所、传感技术联合国家重点实验室,上海200050

出　　处：《微纳电子技术》2023年第2期184-194,共11页Micronanoelectronic Technology

基　　金：上海应用技术大学中青年发展基金项目(ZQ2021-22)。

摘　　要：围绕近年来金属氧化物pH传感器的相关研究,对其传感机理进行了概述,对不同类型金属氧化物pH传感器的研究进展进行了介绍,根据二氧化钌、二氧化铱、五氧化二钽等金属氧化物的特性,分析其作为pH敏感电极的优点和不足,重点分析了4种pH传感器(电位型、电导型、离子敏感场效应管型和外延栅极场效应管型)的制备工艺、工作原理、灵敏度和响应时间,并总结了针对不同应用最适宜的金属氧化物pH传感器类型。最后,对金属氧化物pH传感器面临的问题进行了概述,展望了其未来的发展方向。Around the related researches of metal oxide pH sensors in recent years,the sensing mechanism is summarized,and the research progress of different kinds of metal oxide pH sensors is introduced.According to the characteristics of ruthenium dioxide,iridium oxide,tantalum pentoxide and other metal oxides,the advantages and disadvantages as pH sensitive electrode are analyzed.The fabrication process,working principle,sensitivity and response time of four pH sensors,including potentiometric pH sensor,conductimetric pH sensor,ion sensitive field effect transistor pH sensor and extended gate field effect transistor pH sensor,are analyzed emphatically.The most suitable pH sensor types for different applications are summarized.Finally,the problems faced by metal oxide pH sensor are summarized,and the future development direction is prospected.

关 键 词：PH传感器 金属氧化物 pH敏感电极 离子敏感场效应管 外延栅极场效应管 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]