磁性MEMS传感器制备技术及生物传感应用研究进展  

Research Progress of Fabrication Technology and Biosensing Application of Magnetic MEMS Sensors

作　　者：杨真 柳梦雨 王振宝 黄永 梁晓光 Yang Zhen;Liu Mengyu;Wang Zhenbao;Huang Yong;Liang Xiaoguang(School of Electronic and Information Engineering,Guangxi Normal University,Guilin 541004,China;School of Integrated Circuits,Guangxi Normal University,Guilin 541004,China;School of Physics Science and Technology,Guangxi Normal University,Guilin 541004,China;Key Laboratory of Integrated Circuits and Microsystems(Guangxi Normal University)of Education Department of Guangxi Zhuang Autonomous Region,Guangxi Normal University,Guilin 541004,China;Xidian-Wuhu Research Institute,Xidian University,Wuhu 241000,China)

机构地区：[1]广西师范大学电子与信息工程学院,广西桂林541004 [2]广西师范大学集成电路学院,广西桂林541004 [3]广西师范大学物理与科学技术学院,广西桂林541004 [4]广西师范大学广西高校集成电路与微系统重点实验室,广西桂林541004 [5]西安电子科技大学芜湖研究院,安徽芜湖241000

出　　处：《微纳电子技术》2023年第2期205-221,共17页Micronanoelectronic Technology

基　　金：广西科技基地和人才专项项目(2020AC19178);广西师范大学博士启动经费(DC2100001089);河南省留学人员科技择优计划资助项目;2023年广西师范大学研究生教育创新计划项目。

摘　　要：对磁性传感器件的微电子机械系统(MEMS)加工技术以及在生物医学检测方面的应用进行了简单阐述,分析了磁性生物传感技术的工作原理,重点介绍了巨磁阻抗(GMI)、巨磁阻(GMR)和微磁通门传感器的MEMS制备工艺,其中详述了磁性传感器的材料、几何尺寸、结构以及基底对其性能的影响,总结了磁性生物传感器在生物检测中的研究进展,重点阐述了磁性生物传感器在磁性标签、癌症标志物、食源性细菌、病毒以及细胞检测方面的应用。最后,对当前磁性生物传感器在生物医学检测领域面临的问题进行了简要分析,并对磁性生物传感器未来的应用前景进行了展望,以期为研发新一代可用于临床检测磁性生物检测系统打下良好的基础。The micro-electromechanical system(MEMS)fabrication technology and applications in biomedical detection of magnetic sensors are briefly described,and the operating principle of magnetic biosensing technology is analyzed.The MEMS manufacturing process for giant magneto-impedance(GMI),giant magneto-resistance(GMR)and micro fluxgate sensors is highlighted,the effects of the materials,geometry,structure and substrate on the performance of the magnetic sensors are introduced in details.The research progress of magnetic biosensors in biodetection is summarized,the applications of magnetic biosensors in magnetic labeling,cancer markers,food-borne bacteria,viruses and cellular detection are emphasized.Finally,the current problems faced by magnetic biosensors in the field of biomedical detection are briefly analyzed,and the future application prospect of magnetic biosensors is prospected,laying a good foundation for the development of a new generation of magnetic biosensors systems for clinical detection.

关 键 词：微电子机械系统(MEMS) 巨磁阻抗(GMI)传感器 巨磁阻(GMR)传感器 磁通门传感器 生物传感 生物医学检测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]