基于ZnAl-LDH/MWCNT@MXene的柔性压力/温度双功能传感器  

Flexible Pressure and Temperature Dual-Function Sensor Based on ZnAl-LDH/MWCNT@MXene

作　　者：沈耿哲 黄梓渝 张留艳[1] 胡乐麒 刘志凯 梁天龙 何鑫[3] 谭桂斌 揭晓华[1] Shen Gengzhe;Huang Ziyu;Zhang Liuyan;Hu Leqi;Liu Zhikai;Liang Tianlong;He Xin;Tan Guibin;Jie Xiaohua(Faculty of Material and Energy,Guangdong University of Technology,Guangzhou 510006,China;State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China;Faculty of Applied Physics and Materials,Wuyi University,Jiangmen 529020,China)

机构地区：[1]广东工业大学材料与能源学院,广州510006 [2]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广州510006 [3]五邑大学应用物理与材料学院,广东江门529020

出　　处：《微纳电子技术》2023年第2期242-250,共9页Micronanoelectronic Technology

基　　金：国家自然基金资助项目(52105176);广东省大学生创新创业项目(xj2022118450661)。

摘　　要：锌铝层状双氢氧化物/多壁碳纳米管(ZnAl-LDH/MWCNT)包覆金属碳化物MXene作为复合导电材料制备上下电极,以微结构聚二甲基硅氧烷(PDMS)为介电层,构建了一种柔性双功能传感器。通过器件输出电容信号监测压力,利用单电极的温阻变化监测温度。该柔性电容式传感器的导电层材料为ZnAl-LDH/MWCNT@MXene,搭配微结构为80目的介电层,其性能达到最优。在0~50 kPa时传感器的灵敏度高达1.57%/kPa。温度传感的灵敏度为2.3%/℃,工作温度范围为20~40℃。该器件实现了压力/温度两种物理量的传感,同时可以运用于人体运动和健康状态的实时检测。解决了柔性传感器功能单一的问题,为柔性传感器实现多功能应用提供基础。With zinc-aluminum double layer hydroxide/multi-walled carbon nanotubes(ZnAl-LDH/MWCNTs)coated metal carbide MXene as a composite conductive material to prepare upper and lower electrodes,and microstructured polydimethylsiloxane(PDMS)as a dielectric layer,a flexible dual-function sensor was constructed.The pressure was monitored by the device output capacitance signal,while the temperature was monitored by the temperature resistance change of the single electrode.With the conductive layer material of ZnAl-LDH/MWCNTs@MXene and a microstructure of 80 mesh dielectric layer,the performance of the flexible capacitive sensor is optimal.The sensitivity of the sensor is up to 1.57%/kPa at 0-50 kPa.The sensitivity of the temperature sensing is 2.3%/℃,and the working tempenature range is 20-40℃.The device realizes the sensing of two physical quantities(i.e.,pressure and temperature),which can be used for real-time detection of human motion and health status.It solves the problem of the single function of flexible sensors,and provides the basis for flexible sensors to realize the multi-functional application.

关 键 词：柔性传感器 MXene 多壁碳纳米管(MWCNT) 双层氢氧化物 复合材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]