SPAD阵列读出电路关键技术与发展趋势(特邀)  

Key technologies and development trends of SPAD array readout circuit(invited)

作　　者：郑丽霞[1] 吴金[1] 孙伟锋[1] 万成功 刘高龙 王佳琦 顾冰清 Zheng Lixia;Wu Jin;Sun Weifeng;Wan Chenggong;Liu Gaolong;Wang Jiaqi;Gu Bingqing(Institute of Microelectronics,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学集成电路学院,江苏无锡210096

出　　处：《红外与激光工程》2023年第3期43-51,共9页Infrared and Laser Engineering

基　　金：国家重点研发计划(2022YFB3604905);国家自然科学基金(62174028);江苏省自然科学基金(BK20211046)。

摘　　要：首先针对SPAD阵列读出电路的特点,将电路主要分成接口电路与信号处理电路两大部分,其次根据单光子雪崩光电探测器的阵列的不同应用场景,阐述了集成读出电路中核心电路模块设计的关键技术。分别从SPAD的接口电路设计、两种典型应用成像模式(光子计时、光子计数)中核心电路的设计方面,详细分析此类电路的关键技术以及国内外研究团队在此类电路的研究进展与存在的问题。最后根据目前国内外研究的进展情况,分析了SPAD阵列集成读出电路的发展趋势以及各类电路存在的设计重点与难点,为SPAD阵列读出电路的设计提供一些参考。Significance In recent years,the Single Photon Avalanche Diode(SPAD)with single-photon detection capability has been widely used in weak light detection fields such as laser radar,quantum communication,fluorescence spectrum analysis and so on because of its advantages of high sensitivity,fast response,strong anti-interference ability and small size.As a new nonlinear device,SPAD detector has complex manufacturing process.In addition,various applications of SPAD array need readout integrated circuits(ROIC)for detecting sensing signals to be matched with them to achieve the extraction and processing of SPAD detector avalanche signals.Various applications have increasingly high requirements for array size,detector signal extraction and processing capabilities.At the same time,the parasitic effect,power consumption,area and other problems caused by large-scale array are becoming more and more prominent,which seriously affects the imaging quality.The design of array-type SPAD readout circuit is facing great challenges.Progress The readout circuit of SPAD array is mainly composed of interface circuit and signal processing circuit.The interface circuit realizes the quenching and extraction of avalanche signal,and the switching between the cut-off and the state to be measured of SPAD.It is a dynamic bias circuit.With the expansion of the array scale,it is required to add SPAD anti-bias voltage adjustable circuit in the interface circuit,realize pixel-by-pixel or regionally adjustable bias of SPAD,and SPAD high-voltage breakdown protection circuit.At present,such technology is only used in small-scale,linear array and some applications,but still cannot be realized in the application of large area array.The main difficulty is that complex circuits cannot be used due to the limitation of pixel area.According to the application of SPAD,the signal processing circuit is divided into photon timing circuit and photon counting circuit.The photon timing circuit is used to measure the flight time of photons.In the circuit,the array

关 键 词：读出电路 淬灭电路 飞行时间 光子计数 

分 类 号：TN492[电子电信—微电子学与固体电子学]