低抖动准分子激光放大器光源的研究  

Study on light source of low jitter excimer laser amplifier

作　　者：王怡哲 喻学昊 刘墨林 朱能伟 游利兵 方晓东 Wang Yizhe;Yu Xuehao;Liu Molin;Zhu Nengwei;You Libing;Fang Xiaodong(College of New Materials and New Energies,Shenzhen Technology University,Shenzhen 518118,China)

机构地区：[1]深圳技术大学新材料与新能源学院,广东深圳518118

出　　处：《红外与激光工程》2023年第3期162-168,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金面上项目(62175167);广东省重点建设学科科研能力提升项目(2021ZDJS112);深圳市基础研究重点项目(JCYJ20210324120207021)。

摘　　要：为了获得低抖动的准分子激光放大器光源,设计了一种以氢闸流管作为高压开关的低抖动准分子激光放大器系统。利用抖动小于4 ns的闸流管触发电路来触发导通氢闸流管,从外部触发信号到准分子光信号之间有一定的延时时间。研究了以氢闸流管作为高压开关的准分子激光放电回路,外部控制信号发生电路产生外部充电信号和出光信号,转换电路将外部充电信号和出光信号转换成固定脉宽的光信号,在实现低抖动出光前,准分子激光放大器系统热平衡过程中会有一定的出光延时漂移现象。讨论了激光运行重复率、激光运行电压和气体状态在热平衡过程中对稳定延迟时间大小的影响。实验表明,在相同运行电压下,稳定延迟时间随着激光运行重复频率的提高而增大;运行电压越高,稳定延迟时间上升的幅度越大。气体恶化后,光脉冲稳定延迟时间变小。激光运行电压和重复频率越高,延时漂移时间越大。在温漂一定时间后,准分子激光放大器内部系统达到热平衡,以外部触发信号为基准,准分子光脉冲信号实现在5、10、15 Hz重复频率下的5 ns内低抖动出光。Significance The study of ultrashort pulse laser and its interaction with matter is one of the most popular research fields at present.In order to obtain laser pulse output with higher energy and higher quality,it is needed to make continuous breakthroughs in the research on pulse energy and peak pulse power.Compared with the solid-state laser,excimer laser with the inert gas as the gain medium has its unique advantages in the amplification of the deep ultraviolet femtosecond pulses.Using femtosecond laser pulse as the seed light source,the seed source sends the working signal through the signal controller,and the excimer laser amplifier correspondingly receives the trigger signal sent by the signal controller for pulse amplification,which can obtain high power ultraviolet ultra-short pulse laser.However,in practical application,the pulse repetition rate of seed light under the action of signal controller is unstable and time jitter occurs.Therefore,in order to improve the time synchronization between femtosecond seed light and excimer laser amplifier,the effects of three factors,namely,operation repetition rate,working voltage and gas state,on the luminescence delay time and luminescence time temperature drift of excimer laser amplifier with hydrogen thyratron as high voltage switch were studied in this paper.Progress The alignment molecular laser amplifier is designed in a low-jitter working mode with the hydrogen brake tube as a high-voltage switch(Fig.1).A thyratron trigger circuit with a jitter less than 4 ns is used to trigger the on-off hydrogen thyratron(Fig.5),which in the external design can produce an external charging signal and light signal circuit board and can get rising along the range of about 5 ns light signal(Fig.4).From the external trigger signal to the excimer light signal there is a certain delay time(Fig.5).Before realizing the low jitter light output,there will be a certain light output delay drift phenomenon in the thermal equilibrium process of the excimer laser amplifier system(Fig.6).

关 键 词：准分子激光器 低抖动 放大器 温漂 

分 类 号：TN248.2[电子电信—物理电子学]