衍射光学元件车削误差控制技术  

Error control of diffractive optical element fabricated by single point diamond turning

作　　者：黄岳田 范斌[2] 李世杰 梁海锋 蔡长龙 刘卫国 Huang Yuetian;Fan Bin;Li Shijie;Liang Haifeng;Cai Changlong;Liu Weiguo(Key Laboratory of Thin Film Technology and Optical Inspection of Shaanxi Province,School of Opto-electronic Engineering,Xi'an Technological University,Xi'an 710021,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China)

机构地区：[1]西安工业大学光电工程学院陕西省薄膜技术与光学检测重点实验室,陕西西安710021 [2]中国科学院光电技术研究所,四川成都610209

出　　处：《红外与激光工程》2023年第3期209-217,共9页Infrared and Laser Engineering

基　　金：陕西省科技厅项目(2022GY-222);陕西省科技厅产业链项目(2021ZDGY12-05)。

摘　　要：衍射光学元件在光学系统中的应用越来越广泛,对衍射结构的加工质量提出了更高的要求。单点金刚石车削可直接加工出高精度衍射微结构表面,但衍射结构的位置误差和表面质量对其光学性能有较大影响。为了提高衍射光学元件的性能,需要精确控制其车削误差。基于此,分析了影响衍射元件加工质量的因素,建立了揭示位置误差、衍射面形状和刀具半径之间的关系的数学模型,揭示了衍射带位置精度影响规律。通过补偿加工提升基底表面质量来提高衍射曲面面形精度。结合仿真模型与粗糙度影响参数,指导车削刀具半径的选取。最后,基于仿真结果,选择半径为0.02 mm的半圆弧刀具加工,最终加工的衍射元件面形误差为292 nm,衍射环带位置误差最大为55 nm,高度误差最大为16 nm,粗糙度为5.6 nm。实验结果表明,该预测模型可以指导衍射光学元件高精度表面形貌的获取,有利于提高光学系统的成像质量,为高精度衍射光学元件的批量生产提供了技术支持,具有广泛的工程应用价值。Objective Diffractive optical elements are more and more widely used in infrared optical system,which requires higher processing quality of diffractive structure.High-precision diffractive microstructure surface can be machined directly by single point diamond turning.However,the position error and surface quality of diffraction structure have great influence on its optical properties.The diffraction efficiency of diffractive optical element is mainly affected by surface profile quality and surface roughness.The surface profile error and roughness error will produce shadow and scattering effect,which will reduce the diffraction efficiency of diffractive optical element.In order to improve the performance of diffractive optical components,there have been many researches on improving the turning quality of diffractive optical components,but the influence of the surface morphology of the diffraction plane has been ignored.In order to improve the performance of diffractive optical elements,it is necessary to control their turning errors accurately.Methods The factors affecting the surface quality of the diffraction element in the process of SPDT processing were analyzed.On this basis,a mathematical model among the ring position error,diffraction surface shape and tool radius was established(Fig.1),which was used to simulate and calculate the relationship between the size of the machining residue area and the turning surface roughness and tool radius.The selection of machining parameters of diffraction optical element turning is guided.Combined with the simulation model and roughness influence parameters,the selection of turning tool radius is guided.It provides technical support for obtaining the high-precision surface topography of diffractive optical elements and is beneficial to improve the imaging quality of diffractive optical elements.Then,based on the simulation results,the machining capability of SPDT on the diffraction surface and the validity of the simulation model are verified by experiments,so as to prov

关 键 词：衍射光学元件 环带位置误差 刀具半径 单点金刚石车削 

分 类 号：O439[机械工程—光学工程] TB133[理学—光学]