基于半导体光子学器件的太赫兹成像技术研究进展  

Research progress on terahertz imaging technology based on semiconductor photonics devices

作　　者：王长[1,2] 宋高辉 谭智勇 曹俊诚[1,2] WANG Chang;SONG Gaohui;TAN Zhiyong;CAO Juncheng(Key Laboratory of Terahertz Solid State Technology,Shanghai Institute of Microsystems and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所,太赫兹固态技术重点实验室,上海200050 [2]中国科学院大学材料与光电研究中心,北京100049

出　　处：《量子电子学报》2023年第2期181-192,共12页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金重大仪器项目和面上项目(61927813,61975225);上海市科学技术委员会科技创新行动计划(21DZ1101102)。

摘　　要：太赫兹(THz)成像是THz技术应用的重要方向之一。基于THz量子级联激光器(QCL)和THz量子阱探测器(QWP)等半导体光子学器件的THz成像系统具有结构紧凑、空间分辨率高、成像信噪比较高等优点,已成为当前研究的热点领域。对国内外关于THz QCL和THz QWP器件在远场和近场成像应用方面的研究进行了系统综述,分析了THz成像系统的构成和成像效果,总结了各THz成像系统的性能参数情况,并探讨了THz成像系统性能提升的途径及其应用前景。Terahertz(THz)imaging is one of the important directions for the application of THz technology.THz imaging systems based on semiconductor photonics devices such as THz quantum cascade lasers(QCLs)and THz quantum well photodetectors(QWPs)have the advantages of compact structure,high spatial resolution,and high imaging signal-to-noise ratio,and have become the research highlights in the related field.In this paper,the research progress of far-field and near-field imaging systems based on THz QCL and THz QWP devices is systematically reviewed,the composition,mechanism,and performance of these THz imaging systems are carefully described,the performance parameters of each kind of imaging system are summarized,the methods to further improve the performance of THz imaging system are proposed and their application prospects are also discussed.

关 键 词：激光技术 成像 太赫兹 量子级联激光器 量子阱探测器 

分 类 号：TN365[电子电信—物理电子学]