压电陶瓷快反镜的控制器设计及温度补偿研究  

Controller Design and Temperature Compensation of Piezoelectric Ceramic Fast Steering Mirror

作　　者：徐健峰 黄亮[1] 江涛[1] 施少龙 XU Jian-feng;HUANG Liang;JIANG Tao;SHI Shao-long(Huazhong Institute of Electro-Optics—Wuhan National Lab for Optoelectronics,Wuhan 430223,China)

机构地区：[1]华中光电技术研究所—武汉光电国家研究中心,湖北武汉430223

出　　处：《光学与光电技术》2023年第1期136-142,共7页Optics & Optoelectronic Technology

摘　　要：针对压电陶瓷快速反射镜,设计了一种基于频域分析的传递函数辨识方法,可以实现对任意已知传递函数阶次的系统进行扫频和传函拟合,再基于拟合的压电快反镜传函进行控制器设计、仿真、实物验证,对设计出的控制器进行验证。闭环性能为控制带宽为600 Hz,1V阶跃信号调节时间为12 ms,结果表明控制器性能满足要求。设备运行过程中会受到温漂影响,因此利用温度、光学偏转角和控制电压之间的关系进行温度补偿,实验结果表明温度补偿功能的温漂抑制效果达90%,极大提高了系统控制精度。For piezoelectric ceramic fast steering mirror,a transfer function identification method based on frequency domain analysis is designed,which can realize frequency sweeping and transfer function fitting for any system with known transfer function order.Then the fitted transfer function of piezoelectric fast steering mirror is used for controller design,simulation,and physical verification.The closed-loop performance of the designed controller is verified,which achieves a bandwidth of 600 Hz and a step response time of 12 ms.The results show that the controller meets the performance requirements.The equipment will be affected by temperature drift during operation,therefore the relationship between temperature,optical deflection angle and control voltage is used for temperature compensation.The experimental results show that the temperature compensation function can suppress the temperature drift by 90%,which greatly improves the system control accuracy.

关 键 词：压电陶瓷快反镜 频域分析 控制器 温度补偿 控制精度 

分 类 号：TH74[机械工程—光学工程]