铌酸锂薄膜高速电光开关的设计与制备  

Design and Fabrication of LNOI Based High-speed Electrooptic Switch

作　　者：唐杰 王子彦 钱坤 何晓舟 潘时龙[3] 王琛全 顾晓文 钱广 孔月婵 陈堂胜[1,2] TANG Jie;WANG Ziyan;QIAN Kun;HE Xiaozhou;PAN Shilong;WANG Chenquan;GU Xiaowen;QIAN Guang;KONG Yuechan;CHEN Tangsheng(Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing 210016,CHN;Nanjing Electronic Devices Institute,Nanjing 210016,CHN;College of Electronic and Information Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,CHN;The Shanghai Bureau of Air Force Equipment Department,Shanghai 200231,CHN)

机构地区：[1]微波毫米波单片集成和模块电路重点实验室,南京210016 [2]南京电子器件研究所,南京210016 [3]南京航空航天大学电子信息工程学院,南京211106 [4]空军装备部上海局,上海200231

出　　处：《光电子技术》2023年第1期7-10,16,共5页Optoelectronic Technology

基　　金：国家重点研发计划资助项目(2022YFB2802702);江苏省产业前瞻技术研发项目(BE2021030);重点实验室基金项目(614280304012106)。

摘　　要：基于硅基铌酸锂薄膜(Lithium Niobate on insulator,LNOI)材料平台,设计并制备了高速电光开关芯片,并实现了芯片的光纤耦合、管壳封装和性能测试。测试结果表明,该高速电光开关器件的开关速度达到13.4 ns,消光比达到31.8 dB。研究工作对未来研制光学延时芯片和波束形成网络芯片具有重要的支撑意义。An electro-optic switch was developed based on the lithium niobate on insulator(LNOI) platform. The structure of the LNOI waveguide, multimode interferometer(MMI) coupler and metal electrodes were carefully designed. The fabricated electro-optic switch chip was coupled with optical fiber arrays and packaged by using metal shell. The measured on-off switch time was less than 13.4 ns and the extinction ratio was about 31.8 dB. The results showed that LNOI based electrooptic switch was an excellent candidate for developing high performance integrated optical beamform-ing network chips used in microwave photonic radars.

关 键 词：铌酸锂薄膜 电光开关 光学波束形成 

分 类 号：TN256[电子电信—物理电子学]