一种太赫兹探测器绝对光谱响应度测量方法研究  

Study on the Measurement of Absolute Spectral Responsivity of Terahertz Detector

作　　者：刘红元[1] 吴斌[1,2] 姜涛 杨延召 王洪超[1] 李京松[1] LIU Hong-yuan;WU Bin;JIANG Tao;YANG Yan-zhao;WANG Hong-chao;LI Jing-song(The 41st Research Institute of CETC,Qingdao 266555,China;Science and Technology on Electronic Test&Measurement Laboratory,Qingdao 266555,China;Ceyear Technologies Co.,Ltd.,Qingdao 266555,Chin)

机构地区：[1]中国电子科技集团公司第四十一研究所,山东青岛266555 [2]电子测试技术重点实验室,山东青岛266555 [3]中电科思仪科技股份有限公司,山东青岛266555

出　　处：《光谱学与光谱分析》2023年第4期1017-1022,共6页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(62127804)资助。

摘　　要：绝对光谱响应度是探测器的重要技术参数之一,随着太赫兹探测技术的发展,精确测量太赫兹探测器的绝对光谱响应度变得越来越重要。由于在太赫兹波段缺乏连续可调谐的太赫兹光源以及分光系统,因此无法采用传统测量红外探测器绝对光谱响应度的方法来实现对太赫兹探测器绝对光谱响应度的测量。基于反射法测量了2~10 THz相对光谱响应度,通过CO 2泵浦气体激光器作为泵浦光源测量了2.52和4.25 THz绝对响应度,转化得到2~10 T Hz探测器的绝对光谱响应度,并且对2.52和4.25 THz绝对响应率和相对光谱响应度这两个频率点进行了相互验证,2.52和4.25 THz绝对响应度测量值之比为0.753,相对光谱响应度测量平均值之比为0.749,两者之差仅为0.004,因此,说明本文采用的反射法测量太赫兹探测器相对光谱响应度的方法是可行的。另外水汽在太赫兹波段的测试有很大的影响,对1.5~10 THz波段大气的衰减特性进行了测试,试验表明水汽对太赫兹波有明显的衰减作用,在不同环境湿度下测量时会产生不同的结果,因此在太赫兹探测器测量过程中需要严格的控制大气的湿度,从测试数据可得到,大气中的湿度越小越好。特别是在3.3 THz波段之前,由于本身的信号比较弱,如果水汽过大或测试过程中变化较大,将严重影响测试效果。该系统可以满足太赫兹探测器的研制、生产、检测和应用,它可以为材料的选取、工艺改进、数据补偿、光学系统设计、图像处理提供指导,同时也可以推动太赫兹武器装备效能的重要依据。因此,太赫兹探测器绝对光谱响应度的测量对器件设计制造者、成像装备系统设计制造者以及器件使用者来说都具有非常重要的指导意义。Absolute spectral responsivity is one of the important technical parameters of detectors.With the development of terahertz detection technology,it is becoming increasingly important to measure the absolute spectral responsivity of terahertz detectors accurately.Due to the lack of a continuously tunable terahertz light source and spectroscopic system in the terahertz band,the traditional method of measuring the spectral responsivity of ultraviolet,visible and infrared detectors can not be used to measure the spectral responsivity of terahertz detectors.In this paper,the relative spectral responsivity of 2~10THz is measured based on the reflection method,and CO2measures the absolute responsivity of 2.52and 4.25THz pumped gas laser as the light source,and the absolute spectral responsivity of 2~10THz is obtained.The two frequency points of THz absolute responsivity and relative spectral responsivity are mutually verified.The ratio of absolute responsivity measurements at 2.52and 4.25THz is 0.753,and the ratio of relative spectral response measurements is 0.749.The difference between the two is only 0.004.Therefore,the reflection method used in the article to measure the relative spectral response of the terahertz detector is feasible.In addition,the test of water vapor in the terahertz band has a great influence.This article tests the attenuation characteristics of the atmosphere in the 1.5~10THz band.The test shows that water vapor has a significant attenuation effect on the terahertz wave.When measuring different environmental humidity Will produce different results,so the humidity of the atmosphere needs to be strictly controlled during the measurement process of the terahertz detector.Especially before the 3.3 THz band,due to its weak signal,if the water vapor is too large or changes greatly during the test,the testing effect will be seriously affected.The system can satisfy terahertz detectors’development,production,detection and application.It can guide material selection,process improvement,data compensatio

关 键 词：太赫兹探测器 反射法 绝对光谱响应度 相对光谱响应度 水汽 

分 类 号：O433.1[机械工程—光学工程]