激光直写玻璃基平面波导用于荧光成像  

Direct laser-writing of glass-based planar waveguide for fluorescence imaging

作　　者：张林峰 丁潇川 侯智善 曹宇 Zhang Lin-Feng;Ding Xiao-Chuan;Hou Zhi-Shan;Cao Yu(Zhejiang Key Laboratory of Laser Processing Robot,College of Mechanical&Electrical Engineering,Wenzhou University,Wenzhou 325035,China;China International Science&Technology Cooperation Base for Laser Processing Robotics,Wenzhou University,Wenzhou 325035,China)

机构地区：[1]温州大学机电工程学院,浙江省激光加工机器人重点实验室,温州325035 [2]温州大学激光加工机器人国家国际科技合作基地,温州325035

出　　处：《物理学报》2023年第7期207-212,共6页Acta Physica Sinica

基　　金：浙江省自然科学基金资助(批准号:LZ20E050003,LD22E050001);温州市基础性科研项目(批准号:2022G0025)资助的课题.

摘　　要：荧光显微成像技术具有标记能力强、信号强度高、实验成本低、成像过程简单且从活体到离体均可成像等特点,在肿瘤细胞成像、药物分布体内探测等生物学分析成像研究中应用广泛,但如何同时兼具宽视场和高分辨率是当前荧光显微成像领域的一大难点.平面硅波导被发现可实现超薄样品大范围成像,然而其需要溅射沉积或是离子束刻蚀等制备工艺,相关工艺复杂且设备昂贵.本文设计了一种基于皮秒激光直写的平面波导型荧光显微装置,利用皮秒激光刻蚀玻璃表层快速制备微米级沟槽,进一步通过旋涂SU-8光刻胶实现低成本、批量化制备玻璃基平面波导.通过调整激光加工功率、频率、扫描速度等参数可以定制波导直径和深度.采用罗丹明B荧光分子的显微探测实验,验证了该激光直写玻璃基平面波导完全满足高分辨率和大视场的生物成像需要,这种简易快速的加工手段能够有效提升荧光成像领域的经济效益和社会效益.Fluorescent microscopic imaging technology has the characteristics of strong labeling capability,high signal strength,low experimental cost,simple imaging process,and imaging from living to in vitro,which is widely used in biological analysis imaging research such as tumor cell imaging,drug distribution in vivo detection,but how to simultaneously have both a wide field of view and a high resolution is a major difficulty in the current field of fluorescence microscopic imaging.Planar silicon waveguides have been found to be able to achieve a wide range of imaging of ultra-thin samples.However,they require sputtering deposition or ion beam etching and other preparation processes.The related processes are complex and equipment required is expensive.In this work,a planar-waveguide-type fluorescence microscope device based on direct picosecond-laser-writing is designed,in which picosecond laser is used to etch the glass surface to rapidly prepare micron sized grooves,and the low-cost and batch-preparation of glass based planar waveguides is further realized by spinning SU-8 photoresist.The waveguide diameter and depth can be customized by adjusting laser processing power,frequency,scanning speed and other parameters.The microscopic detection experiment with using Rhodamine B fluorescent molecule verifies that the direct laser-writing glass based planar waveguide fully meets the requirements for biological imaging with high resolution and large field of view.This simple and rapid processing method can effectively improve the the fluorescence imaging.

关 键 词：激光刻蚀 聚合物波导 荧光显微成像 消逝场 

分 类 号：TQ171.7[化学工程—玻璃工业] TN249[化学工程—硅酸盐工业]