压力传感器的设计及测试分析  

Design and Test Analysis of Pressure Sensor

作　　者：于洋[1] 张艳华[1] YU Yang;ZHANG Yanhua(Beijing Institute of Intensity Environment,Beijing,100076 China)

机构地区：[1]北京强度环境研究所,北京100076

出　　处：《科技创新导报》2022年第27期75-78,共4页Science and Technology Innovation Herald

摘　　要：压力传感器作为众多传感器类型中的一种,被广泛应用于工业生产、医疗、环境监测及航空航天领域。为进一步提升压力传感器的精度和性能,在扩大其应用范围的同时,根据应用场景,完成压力传感器的定制化设计;在对压力传感器基本概述的基础上,重点对压阻式压力传感器的基本结构、结构参数及封装形式进行设计;最后,建立压阻式压力传感器测试系统,对其性能和精度进行测试,为后续压力传感器的定制化应用奠定基础。As one of many sensor types,pressure sensor is widely used in industrial production,medical treatment,environmental monitoring and aerospace fields.In order to further improve the accuracy and performance of the pressure sensor,the customized design of the pressure sensor is completed according to the application scenarios while expanding its application range.On the basis of the basic overview of the pressure sensor,the basic structure,structural parameters and packaging form of the piezoresistive pressure sensor are mainly designed.Finally,a piezoresistive pressure sensor testing system is established to test its performance and accuracy,laying the foundation for the subsequent customized application of the pressure sensor.

关 键 词：压力传感器 压敏电阻 MEMS CMOS 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]