半导体含氟废水“结晶-沉淀结合超滤-反渗透”的零排放工艺研究  

Research on Zero Liquid Discharge of Fluoride-Containing Wastewater from Semiconductors Using the"Crystallization-Precipitation Combined with Ultrafiltration-Reverse Osmosis"Process

作　　者：施锡栋 裘洋波 任龙飞[1] 邵嘉慧[1] SHI Xidong;QIU Yangbo;REN Longfei;SHAO Jiahui(School of Environmental Science and Engineering,Shanghai JiaoTong University,Shanghai 200240,China)

机构地区：[1]上海交通大学环境科学与工程学院,上海200240

出　　处：《水处理技术》2023年第4期95-100,共6页Technology of Water Treatment

基　　金：国家重点研发计划“水资源高效开发利用”专项(2019YFC0408201-01);国家自然科学基金资助项目(21737002,52000129);上海市青年科技英才扬帆计划(20YF1419500);中国石油化工股份有限公司镇海炼化分公司企业课题;重庆市自然科学基金面上项目(cstc2021jcyj-msxmX0383)。

摘　　要：采用结晶-沉淀结合超滤-反渗透组合工艺对半导体产业含氟废水进行零排放处理。研究不同钙氟(Ca/F)摩尔比和晶种投加量对结晶-沉淀预处理影响效果;选择合适的超滤和反渗透膜,研究不同操作压力、进水流速、进水温度以及pH对产水通量和水质的动态影响。结果表明,利用同离子效应和晶种异相成核的原理,结晶-沉淀法不仅可以去除99.5%的氟化物,而且能降低32%的污泥含水率,便于污泥循环利用;通过超滤-反渗透膜选择性分离的原理进一步强化了除氟能力。根据产水量动态变化分析确定了组合工艺中超滤-反渗透最佳操作条件。经过双膜处理的产水,其氟化物浓度稳定在0.5 mg/L左右,低于1.5 mg/L(WHO饮用水氟化物标准),其余指标也满足工业用水水质要求,可全部回用。The combination of crystallization-precipitation and ultrafiltration-reverse osmosis process with zero liquid discharge was proposed to treat fluoride-containing wastewater from the semiconductor industry.The effects of different calcium-fluoride(Ca/F)molar ratios and seed crystal dosages on the pretreatment of crystallization-precipitation were studied.The dynamic effects of different operating pressures,feed water flow rates,feed water temperatures,and pH values on the ultrafiltration and reverse osmosis permeate flux and quality were investigated.According to the principle of common ion effect and heterogeneous nucleation,the crystallization-precipitation can not only remove 99.5%of fluoride but also reduce 32%of sludge water content,which can be used for sludge recycling.The fluoride removal efficiency was further strengthened via the membrane selective separation by ultrafiltration-reverse osmosis.The optimal membrane operating conditions were determined according to the dynamic change analysis of the permeate volume.The fluoride concentration in the RO permeance after the double membrane treatment persisted approximately at 0.5 mg/L,which was lower than 1.5 mg/L(as per WHO drinking water fluoride standard).Simultaneously,the rest indexes also meet the requirements of industrial water quality,which can be reused as fresh water.

关 键 词：结晶-沉淀 超滤 反渗透 含氟废水 零排放 

分 类 号：TQ028.8[化学工程]