基于旋涂法制备PDMS膜的定量研究  

Quantitative Study on the Preparation of PDMS Films Based on Spin Coating Technique

作　　者：董雪 杨力 李光耀 徐贤航 王文智毅 朱叶青 DONG Xue;YANG Li;LI Guangyao;XU Xianhang;WANG Wenzhiyi;ZHU Yeqing(School of Information Engineering of Taizhou College,Nanjing Normal University,Taizhou,Jiangsu Province,225300 China)

机构地区：[1]南京师范大学泰州学院信息工程学院,江苏泰州225300

出　　处：《科技创新导报》2022年第28期6-10,15,共6页Science and Technology Innovation Herald

基　　金：泰州市社会发展项目(项目编号:TS202020);大学生创新训练计划项目(项目编号:202113843018Y)。

摘　　要：基于旋涂法改变转速和时间来制备不同厚度的聚二甲基硅氧烷(PDMS)薄膜,并利用控制变量法来定量分析转速和时间与PDMS薄膜的关系。利用傅里叶红外分光光谱仪,对样品表面光谱特性进行表征,即样品在中红外波段下的反射率和透射率,并明确所得光谱特性曲线的含义及原因。基于麦克斯韦方程组,结合界面的边界条件、电磁场分布、光束干涉原理、折射定理及矩阵的理论知识,编写MATLAB程序,计算得到不同参数条件下薄膜表面的光谱特性,将理论结果和实验结果进行对比,从而定量得出转速和时间对PDMS薄膜厚度的影响。研究结果表明,薄膜厚度会随着转速的增大而减小,随着时间的增加而减小。结合厚度和角速度的理论关系,可以得出其具体关系,薄膜的厚度与转速的2/3次方成反比,且与时间的2/3次方成反比。Polydimethylsiloxane(PDMS)films of different thickness were prepared by changing the rotational speed and time of spin coating technique,and the relationship between rotating speed and time and PDMS films was quantitatively analyzed by control variable method.FTIR spectroscopy is used to characterize the surface spectral characteristics of the sample,that is,the reflectivity and transmissivity of the sample in the mid infrared band,and to clarify the meaning and reason of the spectral characteristic curve obtained.Based on Maxwell's equations,combined with boundary conditions of interface,electromagnetic field distribution,beam interference principle,refraction theorem and theoretical knowledge of matrix,MATLAB program is compiled to calculate the spectral characteristics of film surface under different parameter conditions.The theoretical results were compared with the experimental results,and the effects of rotational speed and time on the PDMS film thickness were quantitatively obtained.The results show that the film thickness decreases with the increase of rotating speed and time.The specific relationship can be obtained by combining the theoretical relationship between thickness and angular velocity.The thickness of the film is inversely proportional to the 2/3rd power of rotating speed,and inversely proportional to the 2/3rd power of time.

关 键 词：聚二甲基硅氧烷 厚度 旋转速度 时间 辐射制冷 

分 类 号：O434.3[机械工程—光学工程]