一种混合集成1×4阵列平衡光电探测器的设计  

Design of an Hybrid Integrated 1×4 Array Balanced Photodetector

作　　者：周浪 崔大健[1] 黄晓峰[1] 任丽 陈伟[1] 董绪丰[1] 彭正鑫 严银林 ZHOU Lang;CUI Dajian;HUANG Xiaofeng;REN Li;CHEN Wei;DONG Xufeng;PENG Zhengxin;YAN Yinlin(Chongqing Optoelectronics Research Institute,Chongqing 400060,China)

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《电子技术（上海）》2023年第2期6-8,共3页Electronic Technology

摘　　要：针对合成孔径激光雷达中单个光斑观测视场受限的难题,设计了一种由阵列平衡探测器芯片和阵列跨组放大器芯片混合集成的1×4阵列平衡光电探测器。阵列平衡探测器芯片采用4对背照式InPInGaAs平衡光电二极管单片集成的内平衡结构,降低芯片寄生电容,提高器件的响应频率和一致性。通过倒装集成工艺将阵列平衡探测器芯片和阵列跨组放大器芯片进行集成,缩减像元间距,扩大成像视场。搭建测试系统对进行探测器性能评测,结果显示,其有效像元率达到100%,共模抑制比为33dB,3dB带宽为102MHz,等效噪声功率密度为2.0pW/Hz1/2,增益实现三档可调,整体输出增益一致性为99%,满足合成孔径激光雷达大幅宽成像需求。To solve the problem of limited field of view of a single spot in synthetic aperture lidar, a 1×4 array balanced photodetector is designed, which is composed of array balanced photodetectors and array cross-group amplifiers. array balance detector chips adopts a monolithic integrated internal balance structure of 4-pair backlit InP-InGaAs balance photodiode, which reduces the parasitic capacitance of the chips and improves the response frequency and consistency of the devices.The array balance detector chip and the array cross-group amplifier chip are integrated by flipchip technology, the integration distance between pixels is reduced, and the imaging field of view is enlarged. A test system was built to evaluate the performance of the detector. The results showed that the effective pixel rate was 100%, the Common-mode rejection was 33 dB, the bandwidth of 3dB was 102MHz, the equivalent noise power density was 2.0pW/Hz1/2, and the gain was adjustable in three,the overall gain consistency is 99%, which meets the requirement of large-width imaging of synthetic aperture lidar.

关 键 词：异质结构集成 平衡光电探测器 阵列 合成孔径激光雷达 

分 类 号：TN929.1[电子电信—通信与信息系统] TP368.1[电子电信—信息与通信工程] TP212[自动化与计算机技术—计算机系统结构]