多孔阳极氧化铝介质对大气压介质阻挡放电等离子体的影响  

Influence of Porous Anodic Alumina Dielectric on Atmospheric Pressure Dielectric Barrier Discharge Plasma

作　　者：王坤[1,2] 王世庆 李建[2] 陈伦江[1] WANG Kun;WANG Shiqing;LI Jian;CHEN Lunjiang(Southwestern Institute of Physics,Chengdu 610041,China;Neijiang Normal University,Neijiang 641100,China)

机构地区：[1]核工业西南物理研究院,成都610041 [2]内江师范学院,内江641100

出　　处：《真空科学与技术学报》2023年第2期90-95,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金面上项目(11875039);内江师范学院校级重点项目(2020ZD010,X22B0105)。

摘　　要：为了提高大气压下介质阻挡放电的稳定性,采用阳极氧化方式在铝板表面制备一层多孔阳极氧化铝(Porous anodic alumina,PAA)。运用扫描电子显微镜、划痕仪、金相显微镜和台阶仪测试了阳极氧化铝的表面形貌、厚度等特性。比较分析了石英、陶瓷和PAA为介质的大气压下介质阻挡放电的放电过程图片和放电波形。实验表明:应用阳极氧化法制备的多孔阳极氧化铝具有规则的纳米级多孔结构,膜基结合力好;应用多孔阳极氧化铝作为介质的介质阻挡放电更稳定,放电中产生的更密的微放电有助于降低放电击穿电压和提高放电稳定性;更厚的多孔阳极氧化铝膜为介质的大气压介质阻挡放电具有更好的放电稳定性。To enhance the stability of dielectric barrier discharge at atmospheric pressure,a layer of porous anodic alumina(PAA)was prepared on the surface of an aluminum plate by the anodizing process.The surface morphology,thickness and other characteristics of PAA were tested by the scanning electron microscope,the scratch tester,the metallographic microscope and the step profiler.The discharge process pictures and oscillogram of dielectric barrier discharge with quartz,ceramic and PAA at atmospheric pressure are compared and analyzed.It is shown that PAA prepared by anodizing has a regular nanoscale porous structure with good adhesion.The dielectric barrier discharge with PAA as the dielectric has a more stable discharge process.A denser microdischarge with the PAA dielectric is produced,which helps reduce the discharge breakdown voltage and enhance the discharge stability.Dielectric barrier discharge at atmospheric pressure with thicker porous anodic PAA as dielectric has better discharge stability.

关 键 词：多孔阳极氧化铝 等离子体 介质阻挡放电 放电稳定性 

分 类 号：O535[理学—等离子体物理]