基于AR结构与FPI级联的游标效应增敏温度传感器  

Sensitivityenhanced temperature sensor based on Vernier effect by AR structure and FPI cascade

作　　者：孙远 周大海 刘理[1] SUN Yuan;ZHOU Dahai;LIU Li(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Jiangsu Etern Co Ltd,Suzhou 215211,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]江苏永鼎股份有限公司,江苏苏州215211

出　　处：《传感器与微系统》2023年第4期23-26,共4页Transducer and Microsystem Technologies

摘　　要：提出并实验验证了一种基于游标效应的超灵敏温度传感器,传感器由带有二氧化硅(SiO2)毛细管和空气腔的级联结构组成。毛细管可引起反谐振(AR)效应,空气腔具有法布里—珀罗干涉仪(FPI)的作用。利用FPI进行传感,毛细管作为混合级联传感器的参考干涉仪。实验结果表明:所提出的级联传感器的温度灵敏度显著提高,从0.477 nm/℃提高到2.43 nm/℃,与单一FPI相比,放大系数高达5.06。该传感器具有结构简单、性能稳定等优点。此外,基于AR效应的游标效应研究鲜有报道。An ultrasensitive temperature sensor based on the Vernier effect,which consists of cascade structure with a silica(SiO2)capillary and an air cavity is proposed and experimentally verified.The silica capillary can cause the anti-resonant(AR)effect and the air cavity has functions of Fabry-Perot interferometer(FPI).The FPI is utilized for sensing,the silica capillary is used as a reference interferometer of hybrid cascaded sensor.The experimental results show a significant increase in temperature sensitivity of the proposed cascaded sensor,from 0.477 nm/℃to 2.43nm/℃,and magnification factor is up to 5.06 compared with single FPI.The proposed sensor has advantages of simple construction and stable performance.Additionally,the Vernier effect,based on the AR effect,is rarely reported.

关 键 词：法布里—珀罗干涉仪 反谐振效应 游标效应 温度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN2[自动化与计算机技术—控制科学与工程]