CZTS在快速硫化过程中的相转变  

Investigation of CZTS phase formation by rapid thermal process

作　　者：孔一霖 殷鸿飞 马传贺[1] 张永政 KONG Yilin;YIN Hongfei;MA Chuanhe;ZHANG Yongzheng(School of Physics and Physical Engineering,Qufu Normal University,273165,Qufu,Shandong,PRC)

机构地区：[1]曲阜师范大学物理工程学院,山东省曲阜市273165

出　　处：《曲阜师范大学学报（自然科学版）》2023年第2期14-18,F0002,共6页Journal of Qufu Normal University(Natural Science)

基　　金：山东省泰山学者青年专家计划(tsqn201909107);国家自然科学基金青年科学基金(62104131);山东省高等学校青年创新团队发展计划(2021KJ022);山东省自然科学基金青年科学基金(ZR2020QF077).

摘　　要：首先采用磁控共溅射的方法在镀钼钠钙玻璃上制备了Cu-Zn-Sn三元金属预制层,再以硫粉为硫源,用快速退火处理(RTP)炉分别在200℃、250℃、300℃、350℃、400℃、450℃、500℃、550℃和600℃进行1 h快速热处理,得到不同温度硫化的薄膜,分别采用XRD、Raman、SEM进行物相和表面形貌的表征.结果表明,在硫化退火过程中,在250~300℃,首先形成的二元相有Cu_(2)S、ZnS、SnS;在300~350℃,三元相Cu_(2)SnS_(3)形成;超过350℃时,晶粒尺寸较小的Cu_(2)ZnSnS_(4)(CZTS)开始形成;随着温度继续升高,CZTS的晶粒逐渐长大,杂相减少;当温度达到500℃时,表面形成结晶性好、晶粒尺寸大且无杂相的CZTS薄膜.通过对XRD和Raman图谱的分析,确立了各个温度区间发生相转变的化学反应方程式.Cu-Zn-Sn precursor was prepared by co-sputtering method on molybdenum-coated sodium calcium glass.And then sulfur powder was used as sulfur source during rapid annealing treatment process(RTP)applied at 200℃,250℃,300℃,350℃,400℃,450℃,500℃,550℃and 600℃,respectively,for 1 hour to obtain Cu_(2)ZnSnS_(4)(CZTS)films.The phases and surface morphologies were characterized by XRD,Raman and SEM.The results show that Cu_(2)S,ZnS and SnS binary phases are firstly formed 250~300℃.The ternary phase Cu_(2)SnS_(3)is formed at 300~350℃.Over 350℃,CZTS with small grain size began to form.With the increasing of temperature,the grain size of CZTS grew up gradually and the secondary phases decreased.When the temperature reaches 500℃,CZTS films with large grain size and without secondary phases are formed on the surface and in the bulk.By XRD and Raman spectra analysis,the chemical reaction equations of phase transition during each temperature range are established.

关 键 词：CZTS薄膜 快速热处理 硫化 相变 

分 类 号：TK513[动力工程及工程热物理—热能工程]