飞秒激光加工微纳光学器件  

Femtosecond laser micromachining optical devices

作　　者：董彬 张娟[2] 王达伟 张亦元 张乐然 李瑞[1] 辛晨 刘顺利 张子航 吴昊[1] 蒋绍军 朱苏皖 刘炳瑞 吴东[1] Dong Bin;Zhang Juan;Wang Dawei;Zhang Yiyuan;Zhang Leran;Li Rui;Xin Chen;Liu Shunli;Zhang Zihang;Wu Hao;Jiang Shaojun;Zhu Suwan;Liu Bingrui;Wu Dong(CAS Key Laboratory of Mechanical Behavior and Design of Materials,Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes,Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei,Anhui 230026,China;Department of Clinical Laboratory,the First Affiliated Hospital of USTC,Division of Life Sciences and Medicine,University of Science and Technology of China,Hefei,Anhui 230001,China)

机构地区：[1]中国科学技术大学精密机械与精密仪器系,中国科学院材料力学行为与设计重点实验室,安徽省高等学校精密科学仪器重点实验室,安徽合肥230026 [2]中国科学技术大学第一附属医院,生命科学与医学部,安徽合肥230001

出　　处：《光电工程》2023年第3期74-99,共26页Opto-Electronic Engineering

基　　金：国家自然科学基金资助项目(61927814,52122511,91963127,52075516,U20A20290,52175396);安徽省重大科技专项(201903a05020005)。

摘　　要：光学器件正在向着小型化、集成化以及柔性可变形等方向发展,基于集成微纳光学器件的光学系统以其较低的功耗、快速的响应时间以及高信息容量等优势脱颖而出。然而目前的高精度微纳加工手段如聚焦离子束(focused ion beam,FIB)刻蚀、半导体光刻等工艺复杂,且缺乏灵活性。飞秒激光作为一种非接触、高精度、高脉冲强度的“冷”加工工具在微纳加工方面受到格外青睐。本文首先阐述了飞秒激光加工微纳光学器件的背景及相关机理,然后讨论了提高飞秒激光加工分辨率的各种方法,接着综述了基于飞秒激光的多种先进加工手段,其后总结了近年来飞秒激光加工微透镜、光栅、光波导以及光子晶体方面的代表性研究进展。最后,本文概括了飞秒激光加工微纳光学器件研究领域所面临的挑战以及未来发展方向。Miniaturization,integration,and flexible deformation are the future development trends of optical devices.Meanwhile,optical systems based on integrated micro-optical devices stand out for their low power consumption,fast response,and high information storage capacity.However,current high-precision micro/nano processing methods,such as FIB(Focused Ion Beam)and semiconductor lithography,are far too complex and in lack of flexibility.Femtosecond laser,as a non-contact,high-precision,high-intensity tool for"cold"processing,is particularly favored in micro/nano processing.This review first elucidated the background and mechanism of femtosecond laser micromachining used in optical device.After that,we discussed a number of methods employed to improve the resolution of femtosecond micromachining.Then we listed various advanced processing means based on femtosecond laser and systematically summarized recent representative research developments of femtosecond laser micromachining used in microlens,gratings,optical waveguides,and photonic crystals.Finally,we concluded the challenges and the directions for further development of femtosecond laser machining in the field of micro-optical devices.

关 键 词：飞秒激光 高精度 微纳结构 光学器件 

分 类 号：TB383.1[一般工业技术—材料科学与工程] TN249[电子电信—物理电子学]