微结构传感器的激光制造技术研究进展  

Research progress of laser manufacturing technology for microstructure sensor

作　　者：陈锐 王锦成 章文卓 计东生 朱鑫宁 罗涛 王菁 周伟[1] Chen Rui;Wang Jincheng;Zhang Wenzhuo;Ji Dongsheng;Zhu Xinning;Luo Tao;Wang Jing;Zhou Wei(Department of Mechanical&Electrical Engineering,Xiamen University,Xiamen,Fujian 361005,China;The State Key Laboratory of Fluid Power&Mechatronic Systems,Zhejiang University,Hangzhou,Zhejiang 310027,China)

机构地区：[1]厦门大学机电工程系,福建厦门361005 [2]流体动力与机电系统国家重点实验室,浙江杭州310027

出　　处：《光电工程》2023年第3期100-115,共16页Opto-Electronic Engineering

基　　金：国家自然科学基金区域创新发展联合基金资助项目(U21A20136);国家自然科学基金优秀青年科学基金资助项目(51922092);中央高校基本科研业务费专项资金资助项目(20720200068);流体动力与机电系统国家重点实验室开放基金课题资助项目(GZKF-202103)。

摘　　要：微结构传感器是具有以微尺度结构作为敏感单元,能将外界物理、化学、生物信号转化为电信号的传感器,已广泛应用于智能机器人、健康监控、虚拟电子等领域。目前,微结构传感器的制造方法主要有激光制造技术、MEMS技术和3D打印技术等。激光制造技术是将高能光子束聚焦到被加工物上,使激光与物质相互作用的一种绿色加工方法,主要包括激光烧蚀、激光直写、激光诱导和激光-倒模复合加工等,具有非接触式加工、无掩膜版、可定制化制造等优势,通过优化激光加工工艺参数,可以实现不同尺寸和形状微结构的高效低成本制造。本文对微结构的类型、功能及制造技术进行了概述,同时对激光制造技术制备的微结构传感器进行了归纳分类,详细分析了生物电传感器、温度传感器以及压力传感器的制造技术及应用,最后对微结构传感器激光制造技术的发展趋势进行了总结与展望。Microstructure sensor is a sensor device with the micro-scale structure as a sensitive unit and can convert external physical,chemical,and biological signals into electrical signals.It has been widely used in intelligent robots,health monitoring,virtual electronics,and other fields.At present,the manufacturing methods of microstructure sensors mainly include laser manufacturing technology, MEMS technology, and 3D printing technology. Laser manufacturing technology is a green processing method that focuses the high-energy laser beam on the object to be processed and makes the laser interact with the material, mainly including laser ablation, laser direct writing, laser induction, and laser-template composite processing. It has the advantages of non-contact processing, no mask, and customizable manufacturing. By optimizing the parameters of the laser manufacturing process, it can realize the efficient and low-cost manufacturing of microstructures with different sizes and shapes. In this paper, the types, function, and manufacturing technology of the microstructures are summarized. At the same time, the microstructure sensors fabricated by laser manufacturing technology are summarized and classified, and the manufacturing technology and application of bioelectric sensors, temperature sensors and pressure sensors are analyzed in detail. Finally, the development trends of the laser manufacturing technology for microstructure sensors are summarized and prospected.

关 键 词：激光制造 微结构 生物电传感器 温度传感器 压力传感器 

分 类 号：TN249[电子电信—物理电子学] TN304.12