基于微机械电子技术的自动化测量传感器设计  

Design Scheme of Automatic Measurement Sensor Based on Micro-electromechanical Technology

作　　者：陈静[1] 李济洲[1] Chen Jing;Li Jizhou(Huaibei Vocational and Technical College,Huaibei,Anhui 235000,China)

机构地区：[1]淮北职业技术学院,安徽淮北235000

出　　处：《机电工程技术》2023年第4期208-211,共4页Mechanical & Electrical Engineering Technology

基　　金：院级重点科研项目(编号:2021-A-4)。

摘　　要：为了进一步提升市面上自动化测量传感器的应用效果,简述了自动化测量传感器的工作原理。以真空微电子压力传感器系统为例,从结构设计、仿真模拟、研制工艺设计、固相键合工艺流程以及性能测试几方面对基于微机械电子技术的自动化测量传感器设计方案进行了详细分析。提出了一种微电子技术以及真空电子技术研发一种真空微电子压力传感器的方法,其构成包括真空微腔、绝缘层、弹性阳极膜等,具有实际应用优势,如能够支持批量生产、体积较小、灵敏度高、响应速度快、抗辐射性能好以及稳定性高等。所提方法对微电子传感器领域的发展具有一定的参考价值,应用市场较为广泛,未来发展前景较好。To further enhance the application effect of automated measurement sensors on the market,the working principle of automated measurement sensors was briefly described.Taking a vacuum microelectronic pressure sensor system as an example,a detailed analysis of the design scheme of an automated measurement sensor based on MEMS technology was carried out from several aspects,including structural design,simulation,development process design,solid phase bonding process,and performance testing.A method for developing a vacuum microelectronic pressure sensor based on microelectronics and vacuum electronics technology was proposed.The structure included a vacuum microcavity,an insulating layer,and an elastic anode film.It has practical application advantages,such as being able to support batch production,small size,high sensitivity,fast response,good radiation resistance,and high stability.The proposed method has certain reference value for the development of microelectronic sensors,and has a wide application market and a good future development prospect.

关 键 词：微机械电子技术 自动化测量 传感器设计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]