柔性电容式压力传感器制备及测量综合实验  

Comprehensive Experiment on Fabrication and Measurement of Flexible Capacitive Pressure Sensors

作　　者：王海珍 李哲 刘泽一 郭立峰 李德慧 WANG Haizhen;LI Zhe;LIU Zeyi;GUO Lifeng;LI Dehui(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学光学与电子信息学院,武汉430074 [2]华中科技大学武汉光电国家研究中心,武汉430074

出　　处：《实验室研究与探索》2023年第1期247-251,共5页Research and Exploration In Laboratory

基　　金：华中科技大学2021年实验技术研究项目(校技改项目2021-32)。

摘　　要：柔性电容式压力传感器可用于可穿戴器件和人体生理信号监测而受到广泛关注,为此设计了基于柔性电容式压力传感器制备与测量的综合实验。制备了基于金(Au)电极,空气隙和二氧化硅(SiO2)为介电层,聚二甲基硅氧烷/聚对苯二甲酸乙二醇酯(PDMS/PET)为基底的柔性压力传感器,并搭建一套可实现电容式压力传感器实时测量的装置,采用LabVIEW编程控制其测量过程,实现数据实时显示和存储,并对制备的柔性电容式压力传感器进行参数测量。该实验将压力传感器制备方法与微电子器件制造工艺及手段相结合,不仅可以激发学生的科研兴趣,也有利于提升学生的创新能力。Recently,flexible capacitive pressure sensors have received wide attention due to its unique applications in wearable electronics and human body health monitoring.Therefore,we have designed a comprehensive experiment based on flexible capacitive pressure sensors,which has been fabricated using Au as electrodes,air gap and SiO2 as dielectric layer and PDMS/PET as substrates.Besides,a new setup to realize real-time measurement of capacitive pressure sensors also has been developed,in which LabVIEW was utilized to control the whole measurement process to achieve real time measurement and data save.Furthermore,the as-fabricated flexible capacitive pressure sensors have been measured using this setup.This comprehensive experiment can not only inspire students’interests in research,also is favorable for creativity development of undergraduate students.

关 键 词：柔性电容式压力传感器 制备与测量 创新型实验 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]