一种基于矩形波导缝隙天线的微波低压等离子体装置  

A Microwave Low-Pressure Plasma Device Based on Rectangular Waveguide Slot Antenna

作　　者：苏勇 吴丽[1] 刘高宸 黄卡玛[1] SU Yong;WU Li;LIU Gao-chen;HUANG Ka-ma(College of Electronic and Information Engineering,Sichuan University,Chengdu 610065,China;Sichuan Fumeida Microelectronics Co.,Ltd.,Shehong 629201,China)

机构地区：[1]四川大学电子信息学院,四川成都610065 [2]四川富美达微电子有限公司,四川射洪629201

出　　处：《真空电子技术》2023年第2期65-69,共5页Vacuum Electronics

基　　金：用于芯片封装过程清洁的常压线形微波低温等离子体源研发项目(2021CDSN-11)。

摘　　要：低压等离子体以其放电面积大、均匀性较好、适用于大规模工业应用等优势备受关注。相比于低频等离子体,微波激发的等离子体在电子密度、电离度、活性和装置能量利用率方面性能更优越,应用场景更广阔。本文基于矩形波导缝隙天线及谐振腔结构,设计了一种工作于2.45 GHz的微波低压大面积均匀等离子体装置,为增加等离子体的激发面积且使其更均匀,在馈波波导与反应腔体间设置了多个漏波缝隙,并优化了缝隙的位置和大小,使得腔体内部电场更加均匀。仿真结果显示,优化后反应腔体内部电场分布均匀性良好。实验测试结果表明,反应腔体内部不同位置的等离子体电子密度和等离子体电子温度均呈现均匀状态,证明了该装置激发产生了均匀等离子体。Due to the advantages of large discharge area,better uniformity and favorable to large-scale industrial applications,low-pressure plasma has received great attention in many fields.Research shows that compared to low-frequency plasmas,microwave excited plasmas have higher electron density,higher ionization degree,stronger activity,higher device energy utilization,and broader application scenarios.Based on rectangular waveguide slit antenna and resonant cavity structure,a microwave low-voltage large-area uniform plasma device operating at 2.45 GHz is designed.To increase the excitation area of the plasma and make it more uniform,multiple leakage slits are set between the feed waveguide and the resonant cavity,and the position and size of the slits are optimized to make the electric field inside the cavity more uniform.The simulation results show that the electric field inside the optimized reaction cavity is well distributed.The experimental test results show that the plasma electron density and plasma electron temperature at different locations inside the reaction cavity are uniform,which proves that the device excites a uniform plasma.

关 键 词：微波低压等离子体 缝隙天线 均匀性 等离子体密度 等离子体温度 

分 类 号：TN82[电子电信—信息与通信工程]