基于碳纳米管电子源的计量级电离真空计数值模拟研究  

Numerical Simulation of a Metrological Ionization Vacuum Gauge Based on Carbon Nanotube Electron Source

作　　者：马卓娅 张虎忠[1] 李得天[1] 成永军[1] 姚鹏 葛金国 阴怡媛 韩晓东 MA Zhuoya;ZHANG Huzhong;LI Detian;CHENG Yongjun;YAO Peng;GE Jinguo;YIN Yiyuan;HAN Xiaodong(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 73000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2023年第3期243-250,共8页Vacuum and Cryogenics

基　　金：国家自然科学基金(62171208)。

摘　　要：通过控制电离区域内的电子轨迹和电子能量,能够使计量级电离真空计实现高稳定的超高真空测量。设计了一种基于碳纳米管(CNT)电子源的计量级电离真空计,构建了物理模型,模拟计算了电子透过率、电子传输效率和灵敏度等关键参数,并分析了不同的电子发射分布、电极电压和制造安装公差对灵敏度稳定性等关键参数的影响。该真空计的理论计算灵敏度为0.2517 Pa^(-1),标准偏差为7.7538×10^(-5)Pa^(-1)。The metrological ionization gauge realizes highly stable ultra-high vacuum measurements by controlling both the trajectories of electrons and kinetic energy in the ionization volume.A metrological ionization gauge based on carbon nanotube(CNT)electron source is designed,and a physical model is constructed to simulate the parameters of the electron passing efficiency,the electron transmission efficiency and the sensitivity.The effects of different electron emission distributions,main electrode voltages and fabrication tolerances on the three parameters were also analyzed.The theoretical sensitivity was 0.2517 Pa^(-1) with a standard deviation of 7.7538×10^(-5) Pa^(-1).

关 键 词：计量级电离真空计 碳纳米管电子源 灵敏度 结构设计 SIMION仿真 

分 类 号：TB772.3[一般工业技术—真空技术]