High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation  

作　　者：焦鼎 倪藻 王家畴 李昕欣 JIAO Ding;NI Zao;WANG Jiachou;LI Xinxin(State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China [2]School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Journal of Shanghai Jiaotong university(Science)》2023年第2期197-206,共10页上海交通大学学报（英文版）

基　　金：National Key R&D Program of China(Nos.2016YFA0200800 and 2016YFA0200803);National Natural Science Foundation of China(Nos.61674160 and 61834007)。

摘　　要：This study proposes a novel design and micromachining process for a dual-cantilever accelerometer.Comb and curved-surface structures are integrated into the sensing structure to modulate the squeeze-film damping,thus effectively optimizing the response frequency bandwidth.Owing to the high stress concentration on the dual-cantilever integrated with a fully sensitive piezoresistive Wheatstone bridge,a high sensitivity to acceleration is achieved.In addition,the dual-cantilever accelerometer is fabricated using a specifically developed low-cost and high-yield(111)-silicon single-side bulk-micromachining process.The test results show that the proposed dualcantilever accelerometer exhibits a sensitivity of 0.086—0.088 mV/g/3.3 V and a nonlinearity of±(0.09%—0.23%)FS(full-scale).Based on dynamic characterization,an adequate frequency bandwidth of 2.64 kHz is verified.Furthermore,a resonant frequency of 4.388 kHz is measured,and a low quality factor(Q)of 7.62 is obtained,which agrees well with the design for air-damping modulation.The achieved high performance renders the proposed dual-cantilever accelerometer promising in applications such as automotive and consumer electronics.

关 键 词：ACCELEROMETER CANTILEVER PIEZORESISTANCE MICROMACHINING squeeze-film damping 

分 类 号：TN389[电子电信—物理电子学]