基于射频识别技术的低频玻璃管电子货架系统  

Low-frequency glass tube electronic shelf system based on radio frequency identification technology

作　　者：雷佳彬 罗哉 郑永军 郭斌 胡晓峰 LEI Jiabin;LUO Zai;ZHENG Yongjun;GUO Bin;HU Xiaofeng(College of Metrology&Measurement Engineeing,China Jiliang University,Hangzhou 310018,China;Hangzhou Wolei Intelligent Technology Co.,Ltd.,Hangzhou 310018,China)

机构地区：[1]中国计量大学计量测试工程学院,杭州310018 [2]杭州沃镭智能科技股份有限公司,杭州310018

出　　处：《现代制造工程》2023年第4期69-75,86,共8页Modern Manufacturing Engineering

基　　金：浙江省科技计划项目(2021C01136);国家市场监督管理总局科技计划项目(2021MK189)。

摘　　要：针对部分晶圆厂晶圆盒查找效率低下的问题,设计了一种基于射频识别(Radio Frequency Identification,RFID)技术的低频玻璃管电子货架系统。根据电子货架系统的使用需求对RFID阅读器硬件电路进行了设计,RFID阅读器的中央处理模块采用STM32系列的微控制单元(Microcontroller Unit,MCU),射频模块工作频率为134.2 kHz,采用C语言进行程序编写。基于射频识别技术的低频玻璃管电子货架系统实现了货架上晶圆盒存放信息查询、显示等功能,同时将该电子货架系统数据库中的晶圆盒信息上传至晶圆厂生产管理系统,以方便晶圆调度。基于射频识别技术的低频玻璃管电子货架系统已在杭州某集成电路有限公司正式投入使用,测试和实践应用表明,该电子货架系统读取速度快、识别准确率高,可有效提高晶圆盒查找速度,达到了设计预期效果。In order to solve the problem of inefficient wafer box search in some fabs,the low-frequency glass tube electronic shelf system based on Radio Frequency Identification(RFID)technology was designed.The circuit of the RFID reader was designed according to the use requirements of the electronic shelf system,and the central processor module of the RFID reader uses the Microcontroller Unit(MCU)of the STM32 series,the RF module operates at a frequency of 134.2 kHz,and the program was written in C language.The low-frequency glass tube electronic shelf system based on radio frequency identification technology realizes the functions of querying and displaying the storage information of the wafer box on the shelf,and uploads the wafer box information in the electronic shelf system database to the fab production management system to facilitate wafer scheduling.The low-frequency glass tube electronic shelf system based on radio frequency identification technology has been officially put into use in an integrated circuit company in Hangzhou.the test and actual use results show that the electronic shelf system has fast reading speed and high recognition accuracy,which can effectively improve the wafer box search speed and achieve the expected effect of the design.

关 键 词：射频识别 电子货架 半导体 UCOS-Ⅲ 

分 类 号：TN27[电子电信—物理电子学]