纳米金刚石磨粒团聚对熔石英摩擦磨损性能的影响  

Effect of nanodiamond abrasive agglomeration on tribological properties of fused silica

作　　者：程磊 何洪途 叶敏恒 王超[2] 余家欣[1] CHENG Lei;HE Hongtu;YE Minheng;WANG Chao;YU Jiaxin(Key Laboratory of Testing Technology for Manufacturing Process,Ministry of Education,Southwest University of Science and Technology,Mianyang 621010,China;Institute of Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区：[1]西南科技大学制造过程测试技术教育部重点实验室,四川绵阳621010 [2]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《光学精密工程》2023年第7期1031-1042,共12页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51905506,No.51975492);中国工程物理研究院超精密加工技术重点实验室基金资助项目(No.ZD17005)。

摘　　要：为了研究磁流变抛光液中磨粒团聚对光学玻璃元件的磨损性能,利用环境可控的直线往复式摩擦磨损试验机,以不锈钢球为对磨副,以熔石英为基底,系统地研究了磁流变抛光液中纳米金刚石磨粒团聚程度对熔石英摩擦磨损性能的影响,并利用光学显微镜、白光干涉仪等设备分析熔石英的磨损机制,最后将摩擦学实验结果与实际磁流变抛光结果进行对比。实验结果表明:纳米金刚石磨粒团聚程度越大,熔石英表面的材料去除率越大,磨损区域亚表面损伤情况越严重。当载荷为0.5 N时,熔石英在团聚磨粒作用下的磨损主要以黏着磨损为主,伴随着轻微的磨粒磨损,同时熔石英的亚表面无明显损伤;当载荷从0.5 N增加到4 N时,熔石英的磨损形式以磨粒磨损为主,熔石英的表面和亚表面出现大量损伤。采用相同磨粒团聚程度的抛光液进行熔石英磨损与磁流变抛光实验发现,熔石英在磁流变抛光过程中的材料去除率与磨损实验的材料去除率变化趋势保持一致,表明借助摩擦磨损实验在一定程度上可以预测实际磁流变抛光中的材料去除率。To investigate the effect of abrasive agglomeration on the wear behavior of optical glasses during magnetorheological finishing,this study used an environmentally controlled linear reciprocating tribometer to conduct friction and wear experiments of fused silica by rubbing against a stainless steel sphere and adding different degrees of agglomerated nanodiamond polishing solution.Optical microscopy and a white light interferometer were used to characterize the wear mechanism of the fused silica,and the tribological results were compared with those of actual magnetorheological polishing.Experimental results showed that the material removal rate(MRR)and subsurface damage of the fused silica increased with the degree of nanodiamond particle agglomeration.When the load was 0.5 N,the wear mechanism of the fused silica was domihnated by adhesive and abrasive wear,and no dissemble subsurface damage was found beneath the wear track of the fused silica.When the load was increased from 0.5 to 4 N,the wear mechanism of the fused silica was dominated by abrasive wear,and substantial surface and subsurface damage were found.Both the tribological experiments and magnetorheological polishing were conducted with polishing fluids having the same degree of abrasive particle agglomeration,and results showed that the MRR of the fused silica under the two methods was nearly the same.This indicated that the tribological test could be used to predict the MRR in actual magnetorheological polishing to a certain extent.

关 键 词：磁流变抛光 磨粒团聚 纳米金刚石 熔石英 磨损性能 

分 类 号：TG580.6[金属学及工艺—金属切削加工及机床]