基于氯盐掺杂的单壁碳纳米管室温气体传感器  

Room Temperature Gas Sensors Based on Chloride-Doped Single-Walled Carbon Nanotubes

作　　者：朱明奎 田阗 张如轩 尹欢 苏言杰 Zhu Mingkui;Tian Tian;Zhang Ruxuan;Yin Huan;Su Yanjie(Key Laboratory for Thin Film and Microfabcrication Technology of the Ministry of Education,Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学电子信息与电气工程学院微纳电子学系薄膜与微细技术教育部重点实验室,上海200240

出　　处：《微纳电子技术》2023年第3期385-391,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(62171275)。

摘　　要：对单壁碳纳米管进行掺杂可以促进特定气体分子与单壁碳纳米管之间的电荷转移,从而提高其响应与选择性。使用氯化铯、氯化金对单壁碳纳米管进行掺杂,并在室温下使用Raman光谱研究了单壁碳纳米管与氯盐之间的界面电荷转移,研制了基于氯盐掺杂的单壁碳纳米管的二氧化氮室温气体传感器。研究结果表明,氯盐掺杂的单壁碳纳米管的D峰和2D峰的位置发生了蓝移。氯化铯掺杂的单壁碳纳米管气体传感器对于体积分数为1×10-6的二氧化氮表现出了高达230%的响应度,以及优异的选择性与可重复性。实验结果表明,氯盐掺杂可以改变单壁碳纳米管的费米能级,从而影响单壁碳纳米管对气体分子的传感性能。Doping in single-walled carbon nanotubes(SWCNTs)can promote the charge transfer between specific gas molecules and SWCNTs,thus improving the response and selectivity.Cesium chloride and gold chloride were used to dope SWCNTs,and the interface charge transfer between SWCNTs and chloride was studied by Raman spectroscopy at room temperature.A nitrogen dioxide room temperature gas sensor based on chloride doped SWCNTs was developed.The results show that the positions of D peak and 2D peak of chloride doped SWCNTs are blue shifted.The cesium chloride doped SWCNT gas sensor has a high response of 230%to nitrogen dioxide with a volume fraction of 1×10-6,and excellent selectivity and repeatability.The experiment results reveal that chloride doping can change the Fermi energy level of SWCNTs,thus affecting the sensing performance of SWCNTs to gas molecules.

关 键 词：单壁碳纳米管(SWCNT) 气体传感器 氯化铯 氯化金 二氧化氮 

分 类 号：TB383[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]