基于16×4阵元CMUT面阵的三维超声反射成像  

Three-Dimensional Ultrasonic Reflection Imaging Based on 16×4 Elements CMUT Area Array

作　　者：胡淑敏 杨玉华[1] 裴毓 何常德[1] 张国军[1] 王任鑫[1] 张文栋[1] Hu Shumin;Yang Yuhua;Pei Yu;He Changde;Zhang Guojun;Wang Renxin;Zhang Wendong(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2023年第3期399-405,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金国家重大科学仪器研制项目(61927807)。

摘　　要：为实现非接触式三维超声反射成像,搭建了基于16×4阵元电容式微机械超声换能器(CMUT)面阵的反射成像系统。利用面阵上单个阵元发射、所有阵元接收的方式对硅油中的铝块进行了三维成像测试。采用B模式及二次谐波两种成像算法分别对来自铝块的反射信号进行处理,获取被测物的三维图像及对应的二维切片。基于16×4阵元CMUT面阵的反射成像系统能够确定铝块的位置,实验B模式图像和二次谐波图像中铝块与换能器的距离重建偏差分别为3.63%及1.47%。该系统可实现对被测物的三维反射成像,且三维反射图像中被测铝块的表面清晰可见,重建偏差小,信噪比高。To achieve non-contact three-dimensional ultrasonic reflection imaging,a reflection imaging system based on capacitive micromechanical ultrasonic transducer(CMUT)array with 16×4 elements was built.Three dimensional imaging test was carried out for aluminum blocks in silicon oil by using the method of single array element transmitting and all array elements on the array receiving.Two imaging algorithms,i.e.B-mode and second harmonic,were used to process the reflected signal from the Al block respectively,thus obtaining the three-dimensional image of the measured object and the corresponding two-dimensional slice.Based on the reflective imaging system of CMUT array with 16×4 elements,the position of the Al block can be determined.The distance reconstruction deviation between the Al block and the transducer in the experimental B-mode image and the second harmonic image are 3.63%and 1.47%,respectively.The system can realize three-dimensional reflection imaging of the measured object.And in the three-dimensional reflection image,the surface of the measured Al block is clearly visible,the reconstruction deviation is small and the signal to noise ratio is high.

关 键 词：电容式微机械超声换能器(CMUT) 微电子机械系统(MEMS) 超声反射成像 B模式成像 谐波成像 

分 类 号：TB552[理学—物理] TH703[理学—声学]