声操控型微流控芯片的加工与测试技术  

Manufacture and Testing of Acoustic Microfluidic Chip

作　　者：芦小龙[1] 魏莹[1] 欧欢 赵聪[1] 施陆锴 钱丰 LU Xiaolong;WEI Ying;OU Huan;ZHAO Cong;SHI Lukai;QIAN Feng(State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics Nanjing,210016,China)

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,南京210016

出　　处：《振动．测试与诊断》2023年第2期209-214,404,共7页Journal of Vibration,Measurement & Diagnosis

基　　金：国家自然科学基金资助项目(51975278);江苏省自然科学基金资助项目(BK20181292);南京航空航天大学机械结构力学及控制国家重点实验室自主研究课题资助项目(MCMS-I-0321G01);南京航空航天大学研究生创新基地(实验室)开放基金资助项目(kfjj20200107)。

摘　　要：介绍了一种声操控型微流控芯片的加工方法与测试技术。首先,基于声操控型微流控芯片的工作原理和功能需求设计了硬质微流控芯片的基本结构,采用激光切割方法实现了聚甲基丙烯酸甲酯(polymethylmethacrylate,简称PMMA)材质开放边界微流道的加工,采用数控加工(computerized numerical control,简称CNC)精雕方法实现了封闭边界微流道的加工,通过光固化型(ultra violet,简称UV)胶实现了硬质微流道与基板的室温封接,利用表面改性技术与毛细作用实现了芯片的无泵进样;其次,研究了不同加工工艺、工艺参数对微流道形貌的影响;最后,依据声操控微颗粒需求,综合仿真分析、阻抗测试及多普勒激光测振,选定了声操控型微流控芯片的工作频率,实现了微纳物体运动控制。该微流控芯片具有成本低、加工效率高及易于调整微流道结构的优点,在微纳操控、微纳制造和生化检测方面拥有广阔的应用前景。The manufacturing and testing methods of an acoustic manipulated microfluidic chip are introduced in this study.The basic structure of the rigid microfluidic chip is designed based on the working principle and functional requirements of the acoustic microfluidic chip.The open boundary microchannel made of polymethyl methacrylate(PMMA)is fabricated by laser cutting.The machining of microchannel with closed boundary is realized by computerized numerical control(CNC)fine carving method.The rigid microchannel and substrate are bonded at room temperature by photocuring ultra violet(UV)adhesive.Pumpless injection of fluid is enabled by using surface modification technology and capillary action.The influence of different manufacturing technology and parameters on the micro-channel morphology is investigated.According to the requirements of the acoustically controlled microparticles,the working frequency of the acoustic platform is selected by comprehensive simulation analysis,impedance test,and doppler laser vibration measurement.This kind of microfluidic chip has the advantages of low cost,high processing efficiency,and ease-to-use to meet the needs in diverse applications of micro/nano assembly,micro/nano-manufacturing,and biochemical detection,etc.

关 键 词：微流控 微细加工 压电作动 超声 微颗粒操控 

分 类 号：TH132[机械工程—机械制造及自动化] TB559[理学—物理]