超精密抛光机床设计及床身动态特性分析  

Design of ultra-precise polishing machine and analysis on dynamic characteristics of machine bed

作　　者：林琳[1,2] 刘澈 何周伟 梁旭斌 尤晖[1,2] LIN Lin;LIU Che;HE Zhou-wei;LIANG Xu-bin;YOU Hui(School of Mechanical Engineering,Guangxi University,Nanning 530004;Guangxi Key Lab of Manufacturing System and Advanced Manufacturing Technology,Nanning 530004)

机构地区：[1]广西大学机械工程学院,广西南宁530004 [2]广西制造系统与先进制造技术重点实验室,广西南宁530004

出　　处：《机械设计》2023年第3期70-77,共8页Journal of Machine Design

基　　金：广西制造系统与先进制造技术重点实验室主任课题(15-140-305005);广西八桂学者专项经费(2019A02)。

摘　　要：为满足光学元件表面精密抛光加工的需要和减少加工与检测中二次装夹产生的误差,文中设计研发了一款集精密抛光加工与测量一体化的超精密抛光机床,并对其进行动态特性分析。首先,应用ANSYS Workbench对机床床身模型进行模态分析,得出前6阶固有频率均在100 Hz以内;然后,对机床床身样机进行试验模态测试分析,测试结果与仿真结果基本吻合,误差小于7%,验证了建立的有限元模型具有良好的精度;最后,基于有限元模型,在模态分析的基础上对机床整机进行动态特性分析,分析环境振动和加工振动对机床的加工平台、测量平台等关键位置的振动特性的影响。结果表明:研发的机床结构合理,具有良好的稳定性,为我国超精密机床结构的设计与优化提供了参考与理论依据。In this article,in order to meet the requirements of surface precise polishing of optical components and reduce the errors generated by the secondary clip in terms of processing and detection,an ultra-precise polishing machine with a combination of precise polishing and measurement is developed;its dynamic characteristics are analyzed.ANSYS Workbench is used to carry out modal analysis on the model of the machine bed.The results show that the first six natural frequencies are all within 100 Hz.Then,the prototype of the machine bed is subject to a series of experiment,test and modal analysis.It is shown that the results are basically consistent with those obtained from simulation,and the error is less than 7%,which has verified that the finite-element model enjoys desirable accuracy.Finally,based on the finite-element model and the modal analysis,efforts are made to explore the whole machine’s dynamic characteristics,as well as the influence of environmental vibration and processing vibration on the vibration characteristics of the key positions such as the processing platform and the measuring platform.It is shown that this machine has reasonable structure and desirable stability;this study provides reference and theoretical basis for design and optimization of ultra-precise machine structure in our country.

关 键 词：超精密加工 机床设计 动态特性 

分 类 号：TH6[机械工程—机械制造及自动化]