Thickness dependence of the crystallization and phase transition in ZrO_(2)thin films  

作　　者：Yue Guan Jing Zhou Haodong Zhong Weipeng Wang Zhengjun Zhang Feng Luo Shuai Ning 

机构地区：[1]School of Materials Science and Engineering,Smart Sensing Interdisciplinary Science Center,Nankai University,Tianjin 300350,China [2]School of Materials Science and Engineering,Tsinghua University,Beijing 100084,China

出　　处：《Journal of Advanced Ceramics》2023年第4期822-829,共8页先进陶瓷（英文）

基　　金：supports from the National Key R&D Program of China(Grant No.2021YFA1601004);the National Natural Science Foundation of China(Grant Nos.52102135 and 52272115);State Key Laboratory of New Ceramics&Fine Processing,Tsinghua University(Grant No.KF202103);Key Laboratory of Advanced Materials of Misistry of Education,Tsinghua University(Grant No.ADV22-10).

摘　　要：Fluorite-structure binary oxides(e.g.,HfO_(2)and ZrO_(2))have attracted increasing interest for a broad range of applications including thermal barrier coatings,high-k dielectrics,and novel ferroelectrics.A crystalline structure plays a crucial role in determining physical and chemical properties.Structure evolution of ZrO_(2)thin films,particularly down to the nanometer scale,has not been thoroughly studied.In this work,we carried out systematic annealing analysis on the ZrO_(2)thin films.Through in-situ high-temperature X-ray diffraction(XRD)characterizations,a thickness dependence of crystallization and phase transition is observed.Irrespective of the thickness(10-300 nm),the as-prepared amorphous ZrO_(2)thin films are preferentially crystallized into a tetragonal(t)structure(high-temperature phase),which can be preserved down to room temperature(RT)upon anncaling at the corresponding crystallization temperaturc(T).When anncaling at temperaturcs higher than Tc,the transition from t to monoclinic(m;RT phase)will occur,and the quantity of the transition strongly depends on the film thickness.Our work expands the basic understanding of the phase transition in the ZrO_(2)thin films,and offers a path to the selective control over the phase structure for novel functionalities.

关 键 词：ZIRCONIA CRYSTALLIZATION tetragonal(t) monoclinic(m) phase transition 

分 类 号：TB33[一般工业技术—材料科学与工程]