Mode characteristics of VCSELs with different shape and size oxidation apertures  

作　　者：谢新宇 李健 邱小浪 王永丽 李川川 韦欣 Xin-Yu Xie;Jian Li;Xiao-Lang Qiu;Yong-Li Wang;Chuan-Chuan Li;Xin Wei(Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

出　　处：《Chinese Physics B》2023年第4期347-351,共5页中国物理B（英文版）

摘　　要：Vertical cavity surface emitting laser(VCSELs)as the ideal light source for rubidium(Rb)and cesium(Cs)atomic clocks is analyzed for its mode and polarization control.We fabricated three kinds of shapes:triangular,elliptic,and circular oxidation apertures which also have different sizes.We formed three different shape oxide apertures by wetoxidation with 36μm-39μm circular mesa.Our results show that triangular oxidized-VCSEL has the advantages of mode and polarization selection over elliptic and circular oxide apertures.When triangular oxide-confined VCSELs emit in single mode,the measured side mode suppression ratio(SMSR)is larger than 20 d B and orthogonal polarization suppression ratio achieves 10 d B.Resonant blueshift of VCSELs with triangular and elliptic apertures is observed with the decrease of aperture size.

关 键 词：semiconductor lasers laser diodes microcavity and microdisk lasers semiconductor-device characterization design modeling 

分 类 号：TN248.4[电子电信—物理电子学]