On-chip mechanical computing:status,challenges,and opportunities  

作　　者：Luming Wang Pengcheng Zhang Zuheng Liu Zenghui Wang Rui Yang 

机构地区：[1]Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054,China [2]University of Michigan-Shanghai Jiao Tong University Joint Institute,Shanghai Jiao Tong University,Shanghai 200240,China [3]School of Electronic Information and Electrical En-gineering,Shanghai Jiao Tong University,Shanghai 200240,China [4]State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Elec-tronic Science and Technology of China,Chengdu 610054,China

出　　处：《Chip》2023年第1期58-72,共15页芯片（英文）

基　　金：We gratefully acknowledge the support from National Natural Science Foundation of China(Grants 62250073,U21A20505,U21A20459,62150052,62104029,12104086,62004026,62004032,62104140);Sichuan Science and Technology Program(Grants 2021YJ0517,2021JDTD0028);Fundamental Research Funds for the Central Universities(ZYGX2020ZB014 and ZYGX2020J029);Lingang Laboratory Open Re-search Fund(Grant LG-QS-202202-11);Biren Technology-Shanghai Jiao Tong University Joint Laboratory Open Research Fund,and Science and Technology Commission of Shanghai Municipality(STCSM)Natural Science Project General Program(Grant 21ZR1433800).

摘　　要：With increasing challenges towards continued scaling and improve-ment in performance faced by electronic computing,mechanical com-puting has started to attract growing interests.Taking advantage of the mechanical degree of freedom in solid state devices,micro/nano-electromechanical systems(MEMS/NEMS)could provide alternative solutions for future computing and memory systems with ultralow power consumption,compatibility with harsh environments,and high reconfigurability.In this review,MEMS/NEMS-enabled memories and logic processors were surveyed,and the prospects and challenges for future on-chip mechanical computing were also analyzed.

关 键 词：MEMS/NEMS switch MEMS/NEMS resonator Mechanical computing Mechanical memory Low-power computing 

分 类 号：TN40[电子电信—微电子学与固体电子学]