MEMS重力仪温度、倾斜和气压扰动影响机制及其抑制方法研究  

Research on influence and suppression of temperature,tilt and air pressure disturbances of MEMS gravimeter

作　　者：高乐 张健 殷笑寒 伍文杰[1] GAO Le;ZHANG Jian;YIN Xiaohan;WU Wenjie(School of Physics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学物理学院,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2023年第3期114-119,140,共7页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(41874089,41904157)。

摘　　要：从理论上分析了温度、倾斜、气压效应对微机电系统(MEMS)重力仪的影响机制,以5μGal的零偏稳定性为目标量化环境扰动控制需求,并分别提出三层主动温度控制、机械调平和数据补偿及真空腔封装方案抑制温度、倾斜及气压效应影响.实验结果表明:24 h内重力敏感单元温度波动小于1.6 mK,测温电路漂移0.08 mK,两轴倾斜角度均小于±0.07 mrad,气压波动变化小于0.3 mPa.MEMS重力仪敏感探头集成环境抑制系统后静态本底噪声在1 Hz处为1μGal·Hz-1/2,是国际精度最高的MEMS相对重力仪之一.The influence mechanisms of temperature,tilt,and pressure effects on the MEMS(micro-electro-mechanical system)gravimeter were theoretically analyzed. Then the requirements on environmental disturbance was quantified aiming at a zero bias stability of 5 μGal. For suppressing the influence of temperature,tilt,and pressure effect,three-level active temperature control,mechanical leveling combined with data compensation and encapsulation inside a vacuum chamber were employed,respectively.The experimental results show that the variation of temperature,drift of the circuit for measuring temperature,two-axis tilt angle and pressure are less than 1.6 mK,0.08 mK,±0.07 mrad and 0.3 mPa within 24 h,respectively.After integrated with the environmental suppression system,the calibrated self-noise of the MEMS gravimeter is 1 μGal·Hz-1/2at 1 Hz,which is one of the most sensitive MEMS relative gravimeters reported to date.

关 键 词：微机电系统(MEMS)重力仪 环境效应抑制 流动重力测量 温度效应 倾斜效应 气压效应 

分 类 号：P716.81[天文地球—海洋科学]