高功率266 nm全固态单频连续波激光器研究进展  

Research progress of high-power 266 nm all-solid-state single-frequency CW laser

作　　者：王华行 毛佳佳 叶帅 胡平[2] 周雪 聂鸿坤 李涛 张百涛[1,2] 何京良 杨克建[1,2] Wang Huahang;Mao Jiajia;Ye Shuai;Hu Ping;Zhou Xue;Nie Hongkun;Li Tao;Zhang Baitao;He Jingliang;Yang Kejian(Institute of Novel Semiconductors,State Key Laboratory of Crystal Materials,Shandong University,Jinan 250100,China;Key Laboratory of Laser&Infrared System,Ministry of Education,Shandong University,Qingdao 266237,China)

机构地区：[1]山东大学晶体材料国家重点实验室新一代半导体材料研究院,山东济南250100 [2]山东大学激光与红外系统集成技术教育部重点实验室,山东青岛266237

出　　处：《红外与激光工程》2023年第4期63-73,共11页Infrared and Laser Engineering

基　　金：国家自然科学基金(62175130)。

摘　　要：高功率单频连续波266 nm激光在大容量信息存储、高分辨光谱监测及高精度紫外光刻等领域具有重要应用价值,近年来已成为国内外紫外激光领域的研究热点之一。文中首先综合比较了用于产生高功率266 nm紫外激光的非线性光学晶体基本性能,并根据主要的激光器频率锁定方法,重点分析了H?nsch-Couillaud(H-C)频率锁定和Pound-Drever-Hall(PDH)频率锁定方法的优缺点以及连续波单频266 nm激光器发展现状,介绍了本课题组最新研究成果,即基于H-C频率锁定方法实现了功率1.1 W的单频连续波266 nm紫外激光稳定输出。最后,针对进一步提升全固态单频连续波266 nm激光器性能亟需解决的问题和可能解决路径进行了简要分析和展望。Significance High-power continuous wave(CW)single-frequency ultraviolet(UV)lasers have the advantages of narrow linewidth and concentrated energy distribution,and have shown promising applications in scientific research,industrial production and manufacturing,medical diagnosis and treatment,and civil life,including semiconductor lithography,fine material processing,and high-precision spectral analysis.Compared with traditional excimer lasers,ion lasers and free-electron lasers that produce ultraviolet lasers,all-solid-state ultraviolet lasers have more compact structure,lower cost,higher long-term stability and better beam quality.These advantages make people pay more attention to all-solid-state ultraviolet lasers,and all-solid-state continuous-wave single-frequency ultraviolet lasers will continue to develop towards high power and high reliability.Progress The basic properties of nonlinear optical crystals used to produce high-power 266 nm ultraviolet laser are comprehensively compared(Tab.1).In the design and manufacturing of ultraviolet laser,the selection of nonlinear optical crystals and their optical properties and quality will directly affect the output power and beam quality of ultraviolet laser.In order to obtain higher-performance UV laser output,β-BaB2O4(BBO)crystal,CsLiB6O10(CLBO)and other borate crystals with wide optical band,excellent nonlinear optical effect,stable physical and chemical properties,and high laser damage threshold have been discovered successively,greatly promoting the development of high-power ultraviolet lasers.At present,the method to obtain 266 nm CW singlefrequency ultraviolet laser is mainly obtained by external cavity frequency doubling based on nonlinear optical frequency conversion.Among them,the external cavity resonance enhanced frequency doubling technology based on continuous wave single-frequency 1064 nm all-solid-state laser to generate fourth harmonic has become an important method to obtain continuous wave 266 nm single-frequency laser output under low power condi

关 键 词：全固态单频连续波激光器 266 nm 共振增强 频率锁定 

分 类 号：TN248[电子电信—物理电子学]