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作 者:Xing-Quan Wang Yu Wang Qian Jia Zhao-Chong Ding Jin-Jiang He Song-Xiao Hui
机构地区:[1]State Key Laboratory of Nonferrous Metals and Processes,GRIMAT Engineering Institute Co.,Ltd.,Beijing 101407,China [2]GRIKIN Advanced Material Co.,Ltd. [3]Beijing Technology Research Center for Sputtering Target Material Engineering of High Pure Metals
出 处:《Rare Metals》2023年第3期838-843,共6页稀有金属(英文版)
基 金:financially supported by the National Key R&D Program of China(No.2017YFB0405901)。
摘 要:Al-Sc alloys with high Sc contents are served as sputtering targets for making high-performance piezoelectric devices.The micro structure of these alloys would affect the sputtering process and the final quality of the functional devices.In this study,the microstructure in as-c as ted Al-20%Sc(in atomic ratio)alloys is characterized and the feathery Al3Sc grains with twin relationships are reported for the first time.The crystallographic features of twined structures and growth directions are quantitatively analyzed by electron backscatter diffraction(EBSD)technique.
分 类 号:TG146.21[一般工业技术—材料科学与工程]
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