石英基底上可见光区减反射涂层的双层膜系设计  

Double-Layer Film System Design of Antireflective Coating Covering the Visible Region on Quartz Substrate

作　　者：魏栋 靳志勇 贾红宝[1] 朱世海 WEI Dong;JIN Zhiyong;JIA Hongbao;ZHU Shihai(School of Science,University of Science and Technology,Anshan 114051,China)

机构地区：[1]辽宁科技大学理学院,辽宁鞍山114051

出　　处：《大学物理实验》2023年第2期26-30,共5页Physical Experiment of College

基　　金：辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641);“辽宁科技大学高能光电交叉学科团队”基金。

摘　　要：针对石英光学基底合理设计多层膜系是提高光学器件透射率的关键方法。设计了两种不同的膜系结构,运用导纳轨迹法分析这两种膜系的设计原理。利用光学薄膜设计软件Filmstar分别得到两种膜系的最优解,以使在可见光区膜系的平均透射率尽可能接近于100%。Reasonable design of multilayer film system for quartz optical substrate is the key method to improve the transmittance of optical devices.We designed two different film structures and analyzed the design principles of these two systems via admittance loci method.The optical thin film design software Filmstar is used to obtain the optimal solution of the two film systems respectively,so that the average transmittance of the film system in the visible region is as close as possible to 100%.

关 键 词：Filmstar 减反射膜 膜系设计 导纳轨迹法 溶胶-凝胶法 

分 类 号：O4-33[理学—物理]