电容薄膜真空计的温度特性研究  

Temperature Characteristics of Capacitance Diaphragm Gauge

作　　者：吴成耀 成永军[1] 孙雯君[1] 裴晓强[1] 冉欣 董猛[1] 赵澜[1] WU Chengyao;CHENG Yongjun;SUN Wenjun;PEI Xiaoqiang;RAN Xin;DONG Meng;ZHAO Lan(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空科学与技术学报》2023年第3期225-230,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金青年科学基金项目(No.61901203)。

摘　　要：电容薄膜真空计(Capacitance Diaphragm Gauge,CDG)是一种常用的粗低真空测量传感器,具有较高的测量精度和稳定性。温度是影响真空计量准确性的重要因素之一,环境温度的变化会导致CDG的测量结果发生较大的偏移。为探究温度对CDG测量结果的影响情况,开展了温度环境实验,考察了保温型与非保温型CDG在-30℃~50℃环境中测量结果的变化情况。实验结果表明,保温型CDG在额定温度0℃~45℃环境中测量结果较为稳定,温度高于或低于该区间范围时,测量结果会发生一定程度的偏移;温度对非保温型CDG造成的影响较大,利用温度-压力误差曲面可以修正CDG误差,提高真空计测量精度。Capacitance Diaphragm Gauge(CDG)is a type of sensor commonly used under low vacuum with high accuracy and stability.Temperature is one of the most important factors affecting its measurement accuracy.When the ambient temperature changes,the measurement results of CDGs will also drift accordingly.We experimented with the effect of temperature on CDGs and quantified the measurement errors of heated and unheated CDGs in the environment of−30℃~50℃.The experimental results show that the measurement results of the heated CDGs are stable at the rated temperature 0℃~45℃,and the measurement accuracy will deteriorate if the temperature exceeds this range.The error caused by the temperature for the unheated CDG is relatively large.The temperature-pressure error surface proposed in this paper can effectively reduce the measurement error of the unheated CDG and improve its accuracy.

关 键 词：电容薄膜真空计 温度特性 Delaunay三角剖分插值 

分 类 号：TB772[一般工业技术—真空技术]