宽截止高Q值带通滤光片研究  

Study on Band Pass Filter with Wide Cutoff and High Q Factor

作　　者：晏荆龙 王义翔[1,2] 朱华新 饶东升[1] 刘涛 Yan Jinglong;Wang Yixiang;Zhu Huaxin;Rao Dongsheng;Liu Tao(School of Science,Jiangnan University,Wuxi 214122,Jiangsu,China;Jiangsu Province Research Center of Light Industry OptoElectronic Engineering and Technology,Wuxi 214122,Jiangsu,China)

机构地区：[1]江南大学理学院,江苏无锡214122 [2]江苏省轻工光电工程技术研究中心,江苏无锡214122

出　　处：《激光与光电子学进展》2023年第5期399-407,共9页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年科学基金(61605067);江苏省轻工光电工程技术研究中心(BM2014402)。

摘　　要：选取TiO2和SiO2作为高、低折射率材料,采用传统设计方法(将长波通膜系和短波通膜系分别镀制于基底两侧,厚度分别为1.67μm和8.67μm)设计了蓝宝石基底宽截止高Q值带通滤光片。为避免膜厚差值过大导致的滤光片面形变化较大问题,重新调配了基底两侧的膜系,优化后两侧膜层的数量分别为49层和50层,膜层厚度分别为5.73μm和4.22μm。采用电子束蒸发物理气相沉积法镀制薄膜,并用分光光度计测试了样品的透过率。实验结果表明,样品在通带(521~596 nm)内的平均透过率达到96.59%,在截止区域的平均透过率为0.076%,通带矩形度为0.95,通带两边过渡带的陡度均为0.89%,具有高Q值的滤光片特性。此外,实验曲线和设计曲线的一致性较好,验证了优化两侧膜系结构的有效性。TiO2 and SiO2 are selected as high and low refractive index materials,and the sapphire substrate wide cutoff high Q factor band pass filter is designed by traditional design method(the long wave and short wave pass film systems are plated on both sides of the substrate,with the thickness of 1.67μm and 8.67μm,respectively).In order to avoid the problem of large variation of filter onesided shape caused by large difference of film thickness,the membrane system on both sides of the substrate is rearranged.After optimization,the number of film layers on both sides is 49 and 50,and the thickness of film layer is 5.73μm and 4.22μm,respectively.The thin films are plated by electron beam evaporation physical vapor deposition and the transmittance of the samples is measured by spectrophotometer.The experimental results show that the average transmittance of the sample in the passband(521-596 nm)is 96.59%,the average transmittance in the cutoff region is 0.076%,the rectangularity of the passband is 0.95,and the steepness of the transition zone on both sides of the passband is 0.89%.It has the characteristics of high Q factor filter.In addition,the experimental curve is in good agreement with the design curve,which verifies the effectiveness of optimizing the structure of the twosided membrane system.

关 键 词：薄膜 膜系设计 带通滤光片 薄膜制备 

分 类 号：O484[理学—固体物理]