氮含量对BCN薄膜力学和摩擦学性能的影响  

Effect of Nitrogen Content on Mechanical and Tribological Properties of BCN Films

作　　者：马杨杨 郑韶先 王泽仁 MA Yangyang;ZHENG Shaoxian;WANG Zeren(School of Materials Science and Engineering,Lanzhou Jiaotong University,Lanzhou Gansu 730030,China;Key Laboratory of Marine Advanced Materials and Applied Technology,Chinese Academy of Sciences,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo Zhejiang 315000,China)

机构地区：[1]兰州交通大学材料科学与工程学院,甘肃兰州730030 [2]中国科学院宁波材料技术与工程研究所,中国科学院海洋新材料与应用技术重点实验室,浙江宁波315000

出　　处：《润滑与密封》2023年第4期153-162,共10页Lubrication Engineering

摘　　要：为获得能在较宽温度范围内工作的BCN薄膜,采用闭合场非平衡磁控溅射法制备出非晶态的BCN薄膜和BC_(x)薄膜,通过调控N_(2)流量研究氮含量对薄膜摩擦学和力学性能的影响。结果表明:BCN薄膜的硬度和弹性模量随着N_(2)流量的增加而降低;在室温至600℃较宽温度范围内,N_(2)流量小于20 sccm时制备的BCN薄膜具有更平稳的摩擦因数和低的磨损率,具有比BC_(x)薄膜更好的摩擦学性能。随着N元素的掺杂,BCN薄膜的力学性能降低,但摩擦学性能明显提高,因此通过改变氮含量实现BCN薄膜力学和摩擦学性能合理调控,BCN薄膜有望实现较宽温度范围内的减摩润滑作用。In order to obtain BCN films that can work in a wide temperature range,amorphous BCN films and BC_(x) films were prepared by closed field unbalanced magnetron sputtering.The influence of nitrogen content on the tribological and mechanical properties of the film was studied by adjusting the N_(2) flow rate.The results show that the hardness and elastic modulus of the BCN film decrease with the increase of the N_(2) gas flow rate.In a wide temperature range from room temperature to 600℃,the BCN film prepared when the N_(2) flow rate is less than 20 sccm has a more stable friction coefficient and lower wear rate,and has better tribological properties than the BC_(x) film.With the doping of N elements,the mechanical properties of BCN film decrease,but the tribological properties are significantly improved.Therefore,by regulating the mechanical and tribological properties of BCN film through changing the nitrogen content,BCN film is expected to achieve friction reducing and lubrication in a wide temperature range.

关 键 词：BCN薄膜 摩擦学性能 宽温度范围 力学性能 

分 类 号：TH117.1[机械工程—机械设计及理论]