浮动Ⅵ源的应用研究  

Research on the Application of Floating VI Source

作　　者：秦小文 周晓黎[1] 黄杰[1] 彭浩[1] QIN Xiaowen;ZHOU Xiaoli;HUANG Jie;PENG Hao(The 13th Research Institute of CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《电子质量》2023年第4期44-47,共4页Electronics Quality

摘　　要：Ⅵ源是半导体集成电路性能测试机的核心资源,共性能直接影响着整个测试系统的性能。Ⅵ源通常包括浮动Ⅵ源和共地Ⅵ源。介绍了浮动Ⅵ源相比共地Ⅵ源的优势,例如:浮动Ⅵ源的可叠加性,满足了高电压大电流的要求;浮动Ⅵ源的功能和触发测量功能,极大地提升了阈值参数的测试效率和测试精度;浮动Ⅵ源使高精度差分电压测试更稳定和精确。同时也指出,浮动Ⅵ源并非完全没有缺点,应根据具体应用情况合理地选择Ⅵ源。VI source is the core resource of semiconductor IC test machine,and its performance directly affects the performance of the whole test system.VI sources usually include floating VI sources and common ground VI sources.The advantages of floating VI sources over common VI sources are introduced.For example,the superposition of floating VI source meets the requirements of high voltage and high current.The AWG function and trigger measurement function of folating VI source greatly improve the test efficiency and accuracy of threshold parameters.And the floating VI source makes the high-precision differential voltage test more stable and accurate.At the same time,it is also pointed out that the floating VI source is not completely without disadvantages,and the VI source should be reasonably selected according to the specific application situation.

关 键 词：浮动电压电流源 可叠加性 任意波形发生器 触发测量功能 高精度差分电压测试 

分 类 号：TN401[电子电信—微电子学与固体电子学]