有机物沉积质量对溶胶凝胶减反膜性能的影响规律  

Effects of Organic Contamination Deposition Mass on Properties of Sol-Gel Antireflective Coating

作　　者：梁成杰 庞向阳[1] 孙明营[1] 熊怀[1] 刘文凤 朱健强[1] Liang Chengjie;Pang Xiangyang;Sun Mingying;Xiong Huai;Liu Wenfeng;Zhu Jianqiang(Key Laboratory of High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理重点实验室,上海201800 [2]中国科学院大学材料与光电研究中心,北京100049

出　　处：《中国激光》2023年第5期40-49,共10页Chinese Journal of Lasers

基　　金：中国科学院战略性先导科技专项(XDA25020202,XDA25020103);中国科学院青年创新促进会项目(2018282)。

摘　　要：真空环境中高功率激光装置光学元件表面的有机物污染是限制其负载能力的原因之一。针对装置中常见的有机物污染和三倍频激光溶胶凝胶减反膜,通过精确控制真空环境中污染源的挥发扩散,制备了有机物质量面密度不同的元件表面,定量研究了有机污染物质量面密度对溶胶凝胶减反膜光学性能及损伤特性的影响规律。实验结果表明:样品表面粗糙度、透过率、损伤阈值等的变化量均与有机物质量面密度成正相关。有机污染物沉积量较少时,由于膜层孔隙被填充,膜层的表面粗糙度略有减小;随着沉积量增加,有机物附着影响表面形貌,粗糙度显著增加。溶胶凝胶减反膜在351 nm波长处的光学透过率随着有机物质量面密度的增加而逐渐降低,这与有机物分子改变溶胶凝胶膜孔隙填充比有关。样品表面的激光损伤阈值变化量和损伤面积随着有机物质量面密度的增加而增加,而且不同有机物沉积量的光学表面的损伤形貌存在显著差异。基于实验结果讨论了有机物影响溶胶凝胶减反膜性能的机理,并探讨了高功率激光系统的洁净度控制方法。Objective Optical products are often coated with a solgel antireflective film that has a porous structure with a tendency to adsorb organic contamination easily.This reduces their performance in terms of transmittance and laserinduced damaged threshold(LIDT).Hence,organic contamination volatilized from nonmetallic materials under a high vacuum environment poses a significant limitation on the output capacity of highpower laser systems.In this study,we investigate the influences of the surface deposition of organic contaminations on the surface morphology and roughness,transmittance and LIDT at 355 nm for 3ωsolgel antireflective film quantitatively.Based on the experimental results,we discuss the mechanism by which the organic contamination influences the performance of solgel antireflective coating.Finally,we propose two measures to reduce organic contamination in highpower laser systems,which serves as a basis for improving the cleanliness and output capacity.Methods The experimental section was divided into three parts:sample preparation,optical properties characterization,and laserinduced damage test and characterization.First,an experimental vacuum device was set up to simulate the deposition of organic contamination released from nonmetallic materials onto optical elements surface in highpower laser systems.The deposition of the organic contamination on the solgel antireflective coating was precisely controlled using a heating evaporation chamber.The volatilization of organics was measured using a high precision balance,and the surface mass density of organic deposition was calculated by the principle of angle factor equal division.The second step was to characterize and compare the optical properties of samples before and after contamination.The surface morphology of sample was observed using scanning electron microscope(SEM),the surface roughness was determined using atomic force microscopy(AFM)and the transmittance was measured using LAMBDA 900 UV spectrometer.The last step was the damage test and morpho

关 键 词：薄膜 有机污染物 质量面密度 溶胶凝胶减反膜 透过率 激光诱导损伤 洁净度控制 

分 类 号：TN249[电子电信—物理电子学]