增强宽波段广角度减反射的类锥结构设计分析  

Design and Analysis of Cone-like Structures for Broadband and Wide-Angle Antireflection Enhancement

作　　者：尹靖博 颜黄苹 曹生珠[3] 周锐 王子俊 李远哲 Yin Jingbo;Yan Huangping;Cao Shengzhu;Zhou Rui;Wang Zijun;Li Yuanzhe(School of Aerospace Engineering,Xiamen University,Xiamen 361005,Fujian,China;Shenzhen Research Institute of Xiamen University,Shenzhen 518000,Guangdong,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,Gansu,China)

机构地区：[1]厦门大学航空航天学院,福建厦门361005 [2]厦门大学深圳研究院,广东深圳518000 [3]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000

出　　处：《中国激光》2023年第5期192-201,共10页Chinese Journal of Lasers

基　　金：装备预研重点实验室基金(6142207200606);广东省基础与应用基础研究基金(2020A1515010519);福建省工业高校产学合作项目(2019H6003);福建省科技计划工业引导性重点项目(2020H0006)。

摘　　要：在宽波段内减少反射以提高透射或吸收对于提高光学元件及光电子器件的性能至关重要。受自然启发,亚波长结构具有良好的宽带减反射性能。基于此,提出了一种新型的类锥亚波长结构以增强宽波段减反射。采用等效介质理论与时域有限差分法,对基底表面亚波长结构的等效折射率与减反射能力的关系进行了分析。通过对比蛾眼、圆锥及圆柱等不同结构的等效折射率对应的宽波段减反射性能,发现两种介质之间的等效折射率线性过渡无突变时减反射能力更优。以此提出了一种类锥结构设计方法,将该方法设计的三种结构与蛾眼结构在300~1100 nm波段进行了垂直入射下的表面反射率仿真分析,结果显示,该系列结构的平均反射率比蛾眼结构降低了约70%。此外,在可见光、近红外波段选取两个特征波长进行了宽角度(0~60°)下的反射率研究,结果表明,该系列结构的宽角度平均反射率均低于蛾眼结构,其中四棱类锥结构在两个特征波长下的平均反射率比蛾眼结构分别降低了62%和40%。采用此方法设计的系列结构比普通亚波长结构具有更佳的减反射效果,在超精密光学芯片、片上光集成、片上光互连等领域中具有潜在的应用前景。Objective Reflection,transmission,and absorption are several forms of interactions between light and matter.The reflected light caused by the refractive index difference between different media results in low energy conversion efficiency and signal interference.Therefore,reducing broadband reflection to improve transmission or absorption is crucial for improving the performances of optical components and optoelectronic devices.Currently,the main methods to achieve antireflection are the thinfilm and micronano structure methods.However,a singlelayer antireflection film can only act at a specific wavelength,whereas the material selection of a multilayer antireflection film is difficult.Simultaneously,the film thickness is strictly controlled,and there are certain thermal mismatch and mechanical stability problems among the multiple layers.Research on the micronano structure methods concentrates on the subwavelength antireflection structure,which is an ordered micronano periodic structure that can be equivalent to a dielectric layer with a gradual refractive index to eliminate refractive index mismatch.At present,research on subwavelength antireflection structures mostly focuses on adjusting the size parameters and distribution forms of existing geometric structures,such as cylinder,cone,and motheye structures.The optimal value is a special case for such structures.Alternatively,an improved structure is directly proposed based on the original structure,and its antireflection ability is compared with that of the original structure to prove its superiority.Both methods are based on the analysis of specific situations;therefore,proposing a general design method is useful for expanding the potential application of subwavelength antireflection structures.Methods The antireflection ability of different subwavelength structures is related to the forms of their equivalent refractive indices.In contrast to the above two methods,this study investigates the relationship between the equivalent refractive index of the subwavelen

关 键 词：光学设计 减反射 亚波长结构 等效折射率 时域有限差分法 

分 类 号：TB34[一般工业技术—材料科学与工程] O436[机械工程—光学工程]