Electronic tattoos based on large-area Mo2C grown by chemical vapor deposition for electrophysiology  

作　　者：Shiyu Wang Xin Wang Weifeng Zhang Xiaohu Shi Dekui Song Yan Zhang Yan Zhao Zihan Zhao Nan Liu 

机构地区：[1]Beijing Graphene Institute,Beijing 100094,China [2]Beijing Key Laboratory of Energy Conversion and Storage Materials,College of Chemistry,Beijing Normal University,Beijing 100875,China

出　　处：《Nano Research》2023年第3期4100-4106,共7页纳米研究（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.21903007,22072006,and 22275022);Young Thousand Talents Program(No.110532103);Beijing Normal University Startup funding(No.312232102);Beijing Municipal Science&Technology Commission(No.Z191100000819002);the Fundamental Research Funds for the Central Universities(No.310421109).

摘　　要：Tattoo electronics has attracted intensive interest in recent years due to its comfortable wearing and imperceivable sensing,and has been broadly applied in wearable healthcare and human-machine interface.However,the tattoo electrodes are mostly composed of metal films and conductive polymers.Two-dimensional(2D)materials,which are superior in conductivity and stability,are barely studied for electronic tattoos.Herein,we reported a novel electronic tattoo based on large-area Mo_(2)C film grown by chemical vapor deposition(CVD),and applied it to accurately and imperceivably acquire on-body electrophysiological signals and interface with robotics.High-quality Mo_(2)C film was obtained via optimizing the distribution of gas flow during CVD growth.According to the finite element simulation(FES),bottom surface of Cu foil covers more stable gas flow than the top surface,thus leading to more uniform Mo_(2)C film.The resulting Mo_(2)C film was transferred onto tattoo paper,showing a total thickness of~3μm,sheet resistance of 60-150Ω/sq,and skin-electrode impedance of~5×10^(5)Ω.Such thin Mo_(2)C electronic tattoo(MCET in short)can form conformal contact with skin and accurately record electrophysiological signals,including electromyography(EMG),electrocardiogram(ECG),and electrooculogram(EOG).These body signals collected by MCET can not only reflect the health status but also be transformed to control the robotics for human-machine interface.

关 键 词：electronic tattoo Mo2C film gas flow chemical vapor deposition electrophysiological signals 

分 类 号：TB383[一般工业技术—材料科学与工程]