高精度镜面位置控制的微位移促动器研究  

Research on Micro-displacement Actuator for High Precision Mirror Position Control

作　　者：帅雨林 牛冬生[1,2] 王海[1,2] 潘聪 Shuai Yulin;Niu Dongsheng;Wang Hai;Pan Cong(National Astronomical Observatories/Nanjing Institute of Astronomical Optics&Technology,Chinese Academy of Sciences,Nanjing 210042,China;CAS Key Laboratory of Astronomical Optics&Technology,Nanjing Institute of Astronomical Optics&Technology,Nanjing 210042,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院国家天文台南京天文光学技术研究所,江苏南京210042 [2]中国科学院天文光学技术重点实验室(南京天文光学技术研究所),江苏南京210042 [3]中国科学院大学,北京100049

出　　处：《天文研究与技术》2023年第3期250-257,共8页Astronomical Research & Technology

基　　金：国家自然科学基金(11973067)资助.

摘　　要：随着光学天文望远镜口径不断增大,望远镜主镜多采用拼接镜面形式,而微位移促动器作为镜面拼接技术的关键部件,始终是研究的热点之一。以双螺旋滚珠丝杆代替传统机械式微位移促动器中减速器加滚珠丝杆结构,利用差动螺旋原理进行微位移输出,使用伺服电机作为驱动电机,并对负载时电机所需的转矩进行分析。微位移促动器的输出位移精度、行程及负载能力是重要技术指标,本文从这三方面的要求出发,开展性能测试。实验结果表明,该微位移促动器总行程为5 mm,理论最大可承载1200 N,在200 N的负载下实现200 nm的步长分辨率,开环单向位移精度优于0.65μm,闭环单向位移精度优于0.2μm。验证了所提出的微位移促动器具备高精度、大行程和高负载的要求,为我国未来大口径天文望远镜的设计提供技术储备。With the continuous increase of the aperture of optical astronomical telescopes,the main mirror of the telescope is mostly in the form of spliced mirrors,and the micro-displacement actuator,as a key component of the mirror splicing technology,has always been one of the research hotspots.In this paper,a double-helix ball screw is used to replace the reducer plus ball screw structure in the traditional mechanical micro-displacement actuator.The differential screw principle is used for micro-displacement output,and the servo motor is used as the driving motor,and the torque required by the motor under load is analyzed.This research starts from the requirements of output displacement accuracy,output range and bearing capacity and carry out performance tests.The experimental results show that the total stroke of the micro-displacement actuator is 5 mm,the theoretical maximum load capacity is 1200 N,and the step resolution of 200 nm can be realized under the load of 200 N.The accuracy of open-loop unidirectional displacement is better than 0.65μm,and the accuracy of closed-loop unidirectional displacement is better than 0.2μm,verifying that the proposed micro-displacement actuator scheme meets the requirements of high precision,large stroke and high load,and provides technology for the design of large-aperture astronomical telescopes for future reserve of our nation.

关 键 词：光学天文望远镜 微位移促动器 双螺旋滚珠丝杆 差动螺旋 

分 类 号：TH751[机械工程—仪器科学与技术]