星载微波电路用高纯氧化铝基板的工艺适用性验证技术  

Process Suitability Verification Technology of High-purity Alumina Substrates for Spaceborne Microwave Circuits

作　　者：王平[1] 曲媛[1] 高鸿[2] 贾旭洲 何端鹏 刘泊天 于利夫 文明[2] WANG Ping;QU Yuan;GAO Hong;JIA Xuzhou;HE Duanpeng;LIU Botian;YU Lifu;WEN Ming(China Academy of Space Technology(Xi'an),Xi'an 710100;China Academy of Space Technology,Beijing 100094)

机构地区：[1]中国空间技术研究院西安分院,西安710100 [2]中国空间技术研究院,北京100094

出　　处：《宇航材料工艺》2023年第2期142-147,共6页Aerospace Materials & Technology

摘　　要：为了确保星载微波电路用高纯氧化铝基板的国产化可靠替代,本文通过全面分析星载产品用高纯氧化铝基板的工艺适用性验证需求,研究建立了星载微波电路用高纯氧化铝基板的工艺适用性验证指标体系,确定了验证试验项目,利用微波电路工艺件试验和组件产品环境适应性考核等试验验证手段,示范性地阐释了陶瓷基板类材料工艺适用性验证方法。研究表明,基于验证需求分析确定验证项目,通过试验与工艺实践获得各类验证数据进行多维度综合评价,可以给出客观完整、科学有效的工艺适用性验证结论。In order to ensure the domestic reliable replacement of high-purity alumina substrates for satellite microwave circuits,the requirements for process suitability verification of high-purity alumina substrates for spaceborne products are analyzed comprehensively,research has established a process suitability verification index system for highpurity alumina substrates used in spaceborne microwave circuits,verification test project is comfirmed,experimetal verification methods such as microwave circuit process component test and component product environmental adaptability assessment are utilized,the process suitability verification method of ceramic substrate materials is demonstrated.The study shows the verification project is identified based on verification requirement analysis,all kinds of verification data are obtained through experiment and process practice for multidimensional comprehensive evaluation,the objective,complete,scientific and effective process suitability verification conclusion is given.

关 键 词：微波电路 高纯氧化铝基板 工艺适用性验证 

分 类 号：V19[航空宇航科学与技术—人机与环境工程]