光盘上集成的液体微透镜阵列与可重构超分辨成像  

Realization of reconfigurable super-resolution imaging by liquid microlens arrays integrated on light disk

作　　者：谷同凯 王兰兰[1] 国阳 蒋维涛[1] 史永胜[1] 杨硕 陈金菊 刘红忠[1] Gu Tong-Kai;Wang Lan-Lan;Guo Yang;Jiang Wei-Tao;Shi Yong-Sheng;Yang Shuo;Chen Jin-Ju;Liu Hong-Zhong(State Key Laboratory for Manufacturing System Engineering,School of Mechanical Engineering,Xi’an Jiaotong University,Xi’an 710054,China;School of Mechanical and Electrical Engineering,Xi’an University of Architecture and Technology,Xi’an 710055,China;Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China;School of Engineering,Newcastle University,Newcastle,NE17RU,United Kingdom)

机构地区：[1]西安交通大学机械工程学院,机械制造系统工程国家重点实验室,西安710054 [2]西安建筑科技大学机电工程学院,西安710055 [3]北京航天计量测试技术研究所,北京100076 [4]纽卡斯尔大学工学院,纽卡斯尔NE17RU

出　　处：《物理学报》2023年第9期362-372,共11页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:52075433,52011530186,51625504,51827805);陕西省重点产业链项目(批准号:2021ZDLGY12-04);高等学校博士学科点专项科研基金(批准号:2016M600785,2016BSHEDZZ126,2018T111048)资助的课题。

摘　　要：微透镜辅助显微镜实现超分辨成像观测,具有免标记、无损伤、实时、定域和环境兼容性好等优势.液体微透镜阵列具有均一、易操控的特性,可实现无复杂机械扫描与驱动的超分辨成像.然而,简单高效地精确控制成像距离是微透镜实现超分辨成像的关键技术挑战.本文利用紫外曝光技术,实现了光盘上光刻胶微孔深度的均一性.结合液体自组装技术,在微孔中填充甘油液滴,保证微透镜辅助超分辨的成像距离.在光学显微镜下实现了对226 nm光栅栅线的可重构超分辨观测与1.59倍成像放大.本文从液体微透镜的阿贝显微成像原理出发,通过理论与模拟解释了液体微透镜的成像放大与超分辨特性.由此可见,光盘上集成的液体微透镜阵列在光学纳米测量与传感等器件中展现了巨大的应用潜力.The microlens-assisted microscope realizes super-resolution imaging and observation,and has the advantages of no marking,no damage,real-time,localization,and good environmental compatibility.Liquid microlens arrays with uniformity and easy manipulation can realize super-resolution imaging without complicated mechanical scanning and driving.However,simply and efficiently controlling the imaging distance is a key technical challenge to the realization of super-resolution imaging of microlens.In this paper,the uniform depths of photoresist microholes on light disk are fabricated by ultraviolet exposure technology.Using liquid self-assembly technology,the microholes are filled with glycerol droplets,and thus ensuring the near-field imaging distance of the microlens.The reconfigurable super-resolution of 226-nm-wide grating line and the imaging magnification of 1.59 times are observed under the optical microscope.At present,the theory of superresolution imaging based on microlens is not unified and perfect.In this paper,the Abbe imaging principle is used to explain the imaging magnification and super-resolution characteristics.Therefore,the liquid microlens arrays integrated on the light disk show great potential application in optical nanometer measurements and sensing devices.

关 键 词：液体微透镜阵列 超分辨 成像放大 阿贝成像 

分 类 号：TH74[机械工程—光学工程]